Results 21 to 30 of about 1,189 (200)

Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications. [PDF]

open access: yesSmall Sci
Volatile organic compounds (VOCs) are ubiquitous in natural and human environments, posing environmental and health risks. Recent advancements in micro‐electromechanical system and optical sensing offer new possibilities for VOC detection. This article reviews their progress, focusing on mechanisms, artificial intelligence enhancement, and applications
Li D, Zhou H, Ren Z, Lee C.
europepmc   +2 more sources

Rational Design and Fabrication of MEMS Gas Sensors With Long-Term Stability: A Comprehensive Review. [PDF]

open access: yesAdv Sci (Weinh)
Recent advances in microelectromechanical systems (MEMS) gas sensors are reviewed, emphasizing strategies to enhance long‐term stability, including chemical modification of sensing films and device structural optimization. Key challenges and future opportunities are also highlighted.
Zhang C   +6 more
europepmc   +2 more sources

3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

open access: yesSensors, 2021
This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing.
Ruth Yadira Vidana Morales   +4 more
doaj   +1 more source

Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

open access: yes物联网学报, 2022
A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high ...
Linhao SHI   +5 more
doaj   +2 more sources

Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor

open access: yesNanophotonics, 2021
Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity.
Tao Jin   +10 more
doaj   +1 more source

3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection

open access: yesFractal and Fractional, 2022
This paper presents the FEM modeling and simulation of a thin-film bulk acoustic resonator (FBAR) for a tetrachloroethene (PCE) gas-sensing application.
Bhargav Panchal   +2 more
doaj   +1 more source

Mechanically Driven Solidly Mounted Resonator‐Based Nanoelectromechanical Systems Magnetoelectric Antennas

open access: yesAdvanced Engineering Materials, Volume 25, Issue 21, November 2023., 2023
Solidly mounted resonator (SMR) magnetoelectric (ME) antennas at 1.75 GHz are successfully fabricated, exhibiting an antenna gain of −18.8 dBi and a 1 dB compression point (P1dB) of 30.4 dBm. The 23.3 dB higher power handling capability than same‐size thin‐flm bulk resonator ME antenna significantly enhances robustness; manageable complementary metal ...
Xianfeng Liang   +16 more
wiley   +1 more source

Dielectric response and polarization mechanism of alkali silicate glasses in gigahertz to terahertz frequency range

open access: yesJournal of the American Ceramic Society, Volume 106, Issue 9, Page 5341-5350, September 2023., 2023
Abstract Oxide glasses are dielectric materials with potential applications in high‐frequency communications; hence, their dielectric properties in the gigahertz to terahertz frequency range should be investigated. In this study, the dielectric properties of silica glass and five single alkali silicate glasses were measured at 0.5–10 THz using ...
Kazuki Kanehara   +4 more
wiley   +1 more source

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

open access: yesShock and Vibration, 2022
Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR).
Jieyi Zhu, Meiyan Feng, Guofu Lian
doaj   +1 more source

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

open access: yesAdvanced Functional Materials, Volume 33, Issue 29, July 18, 2023., 2023
3R‐MoS2 based solid mounted resonators with the resonant frequency up to 27 GHz and the electromechanical coupling coefficient ≈47.6% are demonstrated. Successful implantation of 2D piezoelectric 3R‐MoS2 flakes into acoustic resonators suggests that ultrathin 2D piezoelectric nanoflakes can break through the frequency limitation of conventional ...
Yang Yang   +7 more
wiley   +1 more source

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