Results 31 to 40 of about 2,512,391 (143)
Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis. [PDF]
, 2006 A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals.
Zhu, Meiling, Kirby, Paul B.
core +1 more source
The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions
Sensors, 2020 In this paper, an infinite circular ZnO thin film bulk acoustic resonator (FBAR) with a frame-like electrode operating at the thickness-extensional (TE) mode is studied.
Xueli Zhao +4 more
doaj +1 more source
Micromachines, 2017 We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films.
Wenpeng Liu +5 more
doaj +1 more source
Nanotechnology and Precision Engineering, 2022 The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with the currently available detection methods for CWAs.
Xu Yan +4 more
doaj +1 more source
A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications
Micromachines, 2015 Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of
Zhixin Zhang +4 more
doaj +1 more source
Design and Optimization of a BAW Microphone Sensor
Micromachines, 2022 A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology.
Huihui Guo +4 more
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Temperature Cycle Reliability Analysis of an FBAR Filter-Bonded Ceramic Package
Micromachines, 2023 On the background that the operating frequency of electronic devices tends to the radio frequency (RF) segment, a film bulk acoustic resonator (FBAR) filter is widely used in communication and military fields because of its advantages of high upper ...
Wenchao Tian +4 more
doaj +1 more source
Micromachines, 2022 Respiration monitoring is vital for human health assessment. Humidity sensing is a promising way to establish a relationship between human respiration and electrical signal.
Yusi Zhu +5 more
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Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection
Micromachines, 2022 This paper introduces a novel nondestructive wafer scale thin film thickness measurement method by detecting the reflected picosecond ultrasonic wave transmitting between different interfacial layers.
Yongxin Zhou +2 more
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Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer
Materials Research Express, 2021 The temperature sensitivity is one of the critical parameters for the thin film bulk acoustic resonator (FBAR) based temperature sensors. In this work, FBARs with Au/Fe _0.8 Ga _0.2 /Ti/AlN/Mo structure are developed.
Wenkui Lin +7 more
doaj +1 more source