Results 51 to 60 of about 316 (158)
physica status solidi (a), Volume 222, Issue 16, August 2025.The study compares high overtone bulk acoustic wave resonators (HBAR) using fiber‐textured and epitaxial Al0.7Sc0.3N/Mo/AlN stacks on Si(111). HBAR fabricated using an epitaxial stack show superior performance, with 25% higher figure of merit due to improved crystal quality and piezoelectric response.
Balasubramanian Sundarapandian +6 more
wiley +1 more source
The Rise of Refractory Transition‐Metal Nitride Films for Advanced Electronics and Plasmonics
Advanced Materials Interfaces, Volume 12, Issue 12, June 23, 2025.Transition‐metal nitrides (TMNs) are exceptional materials with high stability, biocompatibility, and semiconductor integration, which have been extensively employed in various fields. However, the epitaxial growth of TMN films remains a challenge. The absence of high‐quality TMNs limits the understanding of their condensed matter physics and hinders ...
Jiachang Bi +3 more
wiley +1 more source
Label-free detection of human prostate-specific antigen (hPSA) using film bulk acoustic resonators (FBARs) [PDF]
Sensors and Actuators B: Chemical, 2014 Abstract Label-free detection of cancer biomarkers using low cost biosensors has promising applications in clinical diagnostics. In this work, ZnO-based thin film bulk acoustic wave resonators (FBARs) with resonant frequency of ∼1.5 GHz and mass sensitivity of 0.015 mg/m 2 (1.5 ng/cm 2 ) have been fabricated for their deployment as biosensors. Mouse
Zhao, Xiubo +7 more
openaire +3 more sources
The Role of Silicon Technology in Organ‐On‐Chip: Current Status and Future Perspective
Advanced Materials Technologies, Volume 10, Issue 9, May 6, 2025.This review explores the potential of silicon micro‐nanofabrication technologies in advancing organ‐on‐chip systems. The integration of actuation and sensing modalities, highlight emerging technologies is discussed for combining silicon‐based and polymer‐based components, and emphasize the need for robust, high‐throughput, and customizable organ‐on ...
Frøydis Sved Skottvoll +2 more
wiley +1 more source
A High‐Performance Miniaturized Frequency Shift Detection System for QCM‐Based Gravimetric Sensing
Advanced Sensor Research, Volume 4, Issue 5, May 2025.A miniaturized frequency shift detection system based on a phase‐locked loop (PLL) circuit is proposed for simplifying QCM measurement, possessing excellent performance of high sensitivity, resolution, linearity, and accuracy compared with a commercial frequency analyzer.
Chenyang Gao +6 more
wiley +1 more source
Stacked Integration of MEMS on LSI
Micromachines, 2016 Two stacked integration methods have been developed to enable advanced microsystems of microelectromechanical systems (MEMS) on large scale integration (LSI). One is a wafer level transfer of MEMS fabricated on a carrier wafer to a LSI wafer.
Masayoshi Esashi, Shuji Tanaka
doaj +1 more source
2D α‐In2Se3 Flakes for High Frequency Tunable and Switchable Film Bulk Acoustic Wave Resonators
Advanced Electronic Materials, Volume 11, Issue 4, April 2025.α‐In2Se3 nanoflakes‐based dynamic FBARs are developed. The devices are normally‐on and possess small off‐voltage of −4 V. A 26 MHz tuning range is achieved with control voltage from –2 to 4 V at the resonant frequency of 8.6 GHz. The successful implantation of α‐In2Se3 nanoflakes into dynamic acoustic resonators demonstrates that 2D ferroelectric ...
Jiayi Sun +4 more
wiley +1 more source
A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer
Sensors, 2020 This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on β -phase polyvinylidene fluoride (PVDF) piezoelectric polymer.
Ting Wu +11 more
doaj +1 more source
IET Microwaves, Antennas &Propagation, Volume 19, Issue 1, January/December 2025.This paper investigates mutual coupling reduction in a five‐element antenna array with constrained aperture dimensions, focusing on polarisation‐insensitive absorptive wall‐type metamaterials for enhanced anti‐jamming performance. The absorptive‐metamaterials‐enhanced adaptive array offers significant advantages for miniaturised platforms and is well ...
Guanjun Wang +4 more
wiley +1 more source
Advanced Functional Materials, Volume 34, Issue 39, September 25, 2024.Thin‐film bulk acoustic resonator(FBAR) magnetoelectric(ME) antenna arrays utilize magnetic dipoles for radiation, delivering superior gain, and efficiency. As array element increases, performance is boosted by enhanced magnetic moment, while maintaining impedance matching and quality factor.
Bin Luo +5 more
wiley +1 more source