Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications [PDF]
, 2011 The work reported here shows a direct experimental comparison of the sensitivities of AlN solidly mounted resonators (SMR)-based biosensors fabricated with standard metal electrodes and with carbon nanotube electrodes.
, +13 more
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Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection
Micromachines, 2022 This paper introduces a novel nondestructive wafer scale thin film thickness measurement method by detecting the reflected picosecond ultrasonic wave transmitting between different interfacial layers.
Yongxin Zhou +2 more
doaj +1 more source
, 2018 This letter presents the experimental demonstration of a film bulk acoustic resonator (FBAR) circulator at 2.5 GHz. The circulator is based on spatio-temporal modulation of the series resonant frequency of FBARs using varactors and exhibits a large ...
Bhave, Sunil A. +4 more
core +1 more source
Design and simulation of Film Bulk Acoustic Wave Resonator (FBAR) Gas Sensor Based on ZnO Thin Film [PDF]
2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), 2019 The interest in miniature device has led to the development of thin film bulk acoustic wave resonator (FBAR). The function of a resonator to gain a high resonant frequency value of an equipment make FBAR is suitable to act as sensor and filter for wide range of applications.
Zarifsofia Sabani +4 more
openaire +1 more source
Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer
Materials Research Express, 2021 The temperature sensitivity is one of the critical parameters for the thin film bulk acoustic resonator (FBAR) based temperature sensors. In this work, FBARs with Au/Fe _0.8 Ga _0.2 /Ti/AlN/Mo structure are developed.
Wenkui Lin +7 more
doaj +1 more source
Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators [PDF]
, 2006 A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon.
Abadal Berini, Gabriel +7 more
core +2 more sources
Streptavidin Modified ZnO Film Bulk Acoustic Resonator for Detection of Tumor Marker Mucin 1 [PDF]
, 2016 A ZnO-based film bulk acoustic resonator has been fabricated using a magnetron sputtering technology, which was employed as a biosensor for detection of mucin 1.
Dan Zheng +3 more
core +1 more source
6.4 GHz Acoustic Sensor for In-situ Monitoring of AFM Tip Wear [PDF]
, 2011 This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a ...
Bhave, S.A. +4 more
core +1 more source
Magneto Acoustic Spin Hall Oscillators
, 2018 This paper introduces a novel oscillator that combines the tunability of spin Hall-driven nano oscillators with the high quality factor (Q) of high overtone bulk acoustic wave resonators (HBAR), integrating both reference and tunable oscillators on the ...
Bhave, Sunil A. +3 more
core +1 more source
MEMS‐Based Magnetoelectric Antennas for Wireless Power Transmission in Brain‐Implantable Devices
Advanced Materials Technologies, Volume 11, Issue 3, 5 February 2026.Magnetoelectric (ME) antennas allow the minimization of the invasiveness of brain implantable devices, via powering wirelessly systems able to actuate neural tissue. In order to achieve the necessary power efficiency transmission, the choice of the materials and the system assembly is vital.
Laura Mazón‐Maldonado +5 more
wiley +1 more source