C-Axis Oriented LiNbO<sub>3</sub> Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications. [PDF]
Smagin N +12 more
europepmc +1 more source
Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment. [PDF]
Yang T +15 more
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High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure. [PDF]
Zuo W +6 more
europepmc +1 more source
Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2. [PDF]
Nian L +10 more
europepmc +1 more source
A vibration analysis of an acoustic mass sensor structure with a c-axis tilted ZnO thin film based on silicon. [PDF]
Liu J, Li X, Li X.
europepmc +1 more source
Super-High-Frequency Bulk Acoustic Resonators Based on Aluminum Scandium Nitride for Wideband Applications. [PDF]
Dou W +6 more
europepmc +1 more source
Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review. [PDF]
Yang Y, Dejous C, Hallil H.
europepmc +1 more source
Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film. [PDF]
Sorokin B +5 more
europepmc +1 more source
A Review of Wafer-Level Packaging Technology for SAW and BAW Filters. [PDF]
Liu X +5 more
europepmc +1 more source
Flexible Film Bulk Acoustic Resonator Based on Low-Porosity β-Phase P(VDF-TrFE) Film for Human Vital Signs Monitoring. [PDF]
Yu Z +6 more
europepmc +1 more source

