Results 71 to 80 of about 2,512,391 (143)

An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

Sensors, 2019
Acoustic devices have found wide applications in chemical and biosensing fields owing to their high sensitivity, ruggedness, miniaturized design and integration ability with on-field electronic systems.
Adnan Mujahid, Adeel Afzal, Franz L. Dickert   +2 more
doaj   +1 more source

Ozone senosr using ZnO based film bulk acoustic resonator

, 2011
This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film.
R. Tang, Tang, R., J. Shi, H. Huang, Wang, H., Qiu, X., X. Qiu, Zhu, J., Yu, H., Z. Wang, J. Zhu, Shi, J., H. Wang, J. Oiler, Oiler, J., H. Yu, Wang, Z., Huang, H.   +17 more
core   +1 more source

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Proceedings, 2017
Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by
Michael Schneider, Mario DeMiguel-Ramos, Andrew J. Flewitt, Enrique Iborra, Ulrich Schmid   +4 more
doaj   +1 more source

LiNbO3 Film Bulk Acoustic Resonator

, 2010
International audienceAs layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultra wide band RadioFrequency (RF) filters.
M. Aid, Defaÿ, E., Aïd, M., S. Loubriat, S. Ballandras, Queste, S., S. Queste, A. Reinhardt, Loubriat, S., M. Pijolat, D. Mercier, Mercier, D., Reinhardt, A., Deguet, C., Pijolat, M., Ballandras, S., C. Deguet, E. Defay   +17 more
core   +1 more source

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

Sensors, 2010
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64
Matthias Schreiter, Inger Vikholm-Lundin, Dana Pitzer, Ann-Charlotte Hellgren, Sanna Auer, Kari Tukkiniemi, Arto Rantala, Martin Nirschl   +7 more
doaj   +1 more source

Film bulk acoustic-wave resonator based ultraviolet sensor

, 2009
This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR.
X. Qiu, Zhu, J., Yu, H., C. Yu, Z. Wang, J. Zhu, J. Oiler, Oiler, J., H. Yu, Wang, Z., Qiu, X., Yu, C.   +11 more
core   +1 more source

Film bulk acoustic resonator fabrication for radio frequency filter applications

, 2000
In this paper, a two-step radio frequency (RF) sputtering deposition technique for piezoelectric ZnO film formation and its successful application for film bulk acoustic resonator (FBAR) devices are presented.
Park, HD, Yoon, Giwan, Park, SH, Seo, BC
core   +1 more source

Film bulk acoustic-wave resonator based radiation sensor

, 2010
This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3
Oiler, Jonathon, Holbert, Keith, Barnaby, Hugh, Qiu, Xiaotun, Yu, Cunjiang, Yu, Hongyu, Wang, Ziyu, Zhu, Jie   +7 more
core   +1 more source

Film bulk acoustic wave resonator filter for Ku-band applications

, 2013
The design and analysis of Ku-band ladder-type filters based on film bulk acoustic wave resonator (FBAR) is presented. The proposed FBAR filter has an insertion loss of -3dB, out-of-band rejection of -12dB, centre frequency of 15.5GHz with 3dB bandwidth ...
Nor, NIM (15634469), Singh, J (15634463), Sauli, Z (15634475), Shah, K (15634472)   +3 more
core   +1 more source

Infrared detection using film bulk acoustic resonators

, 2011
This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased linearly when there was IR (peak wavelength at 780 nm) illumination on the device. The sensing mechanism was
Shi, Jing, Qiu, Xiaotun, Yu, Hongyu, Wang, Ziyu   +3 more
core   +1 more source