Results 91 to 100 of about 2,512,391 (143)

A review of piezoelectric MEMS sensors and actuators for gas detection application. [PDF]

Discov Nano, 2023
Ba Hashwan SS, Khir MHM, Nawi IM, Ahmad MR, Hanif M, Zahoor F, Al-Douri Y, Algamili AS, Bature UI, Alabsi SS, Sabbea MOB, Junaid M.   +11 more
europepmc   +1 more source

Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment. [PDF]

Nat Commun
Yang T, Xu Q, Wang Y, Cai Y, Li H, Zheng Y, Zeng M, Qu J, Li L, Gao C, Gu X, Lin B, Guo S, Lei C, Liu S, Sun C.   +15 more
europepmc   +1 more source

A vibration analysis of an acoustic mass sensor structure with a c-axis tilted ZnO thin film based on silicon. [PDF]

Sci Rep
Liu J, Li X, Li X.
europepmc   +1 more source

High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure. [PDF]

Sensors (Basel)
Zuo W, Gu X, Yang T, Xu Q, Li H, Cai Y, Sun C.   +6 more
europepmc   +1 more source

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2. [PDF]

Micromachines (Basel), 2022
Nian L, Zou Y, Gao C, Zhou Y, Fan Y, Wang J, Liu W, Liu Y, Soon JB, Cai Y, Sun C.   +10 more
europepmc   +1 more source

Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review. [PDF]

Micromachines (Basel), 2022
Yang Y, Dejous C, Hallil H.
europepmc   +1 more source

The fabrication of mass sensor using thin-film bulk acoustic resonator (FBAR)

, 2007
In this study, ZnO film bulk acoustic resonators (FBARs) are proposed to fabricate the mass sensor of high sensitivity. The acoustic cavity is achieved by potassium hydroxide (KOH) etching.
Chang, Wei-tsai
core  

A Review of Wafer-Level Packaging Technology for SAW and BAW Filters. [PDF]

Micromachines (Basel)
Liu X, Pei W, Zhao J, Xu R, Zhong Y, Yu D.   +5 more
europepmc   +1 more source

Super-High-Frequency Bulk Acoustic Resonators Based on Aluminum Scandium Nitride for Wideband Applications. [PDF]

Nanomaterials (Basel), 2023
Dou W, Zhou C, Qin R, Yang Y, Guo H, Mu Z, Yu W.   +6 more
europepmc   +1 more source

Switchable and tuneable high-performance acoustic modes in the L-X band using ferroelectric thin film on sapphire. [PDF]

Microsyst Nanoeng
Kongbrailatpam SS, T S AR, K C JR, Pillai G.   +3 more
europepmc   +1 more source