Results 81 to 90 of about 2,512,391 (143)

Fabrication and analysis of ZnO thin film bulk acoustic resonators

, 2012
[[abstract]]This study employs RF magnetron sputter technique to deposit high C-axis preferred orientation ZnO thin film on silicon substrate, which is then used as the piezoelectric thin film for a thin film bulk acoustic resonator (FBAR).
Lin, Yi- Cheng ; Hong, C. R. ; Chuang, H. A.
core  

Film bulk acoustic resonator at 4.4 GHz with ultra low temperature coefficient of resonant frequency

, 2005
This paper describes a temperature compensated Film Bulk Acoustic Resonator (FBAR) with Temperature Coefficient of resonant Frequency (TCP) of-0.45 ppm/°C (between 85 and 110°C) at 4.4 GHz.
Kim, Eun Sok, Yu, Hongyu, Zhang, Hao, Pang, Wei   +3 more
core   +1 more source

DEVICE AND FABRICATION METHOD OF FILM BULK ACOUSTIC RESONATOR

, 2012
본 발명은, 두 금속 전극 사이에 산화아연(Zinc Oxide)을 압전 유전체 층으로 형성하는 FBAR(Film Bulk Acoustic Resonator) 소자에 관한 것으로, 이를 위해 본 발명은, FBAR 소자의 산화아연(ZnO)층을 산소/아르곤(O2/Ar) 혼합 가스 또는 아르곤(Ar) 가스를 반응가스로 하여 스퍼터링(sputtering) 방식 및 이에 준하는 방법(CVD, MBE 등)으로 증착하는 종래와는 달리, 산화아연(ZnO)층에 질소(N)
이은주, 윤기완
core   +1 more source

Acetone sensor based on Film Bulk Acoustic Resonator

, 2010
This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the
Rui Tang, Hongyu Yu, Jie Zhu, Jon Oiler, Qiu, Xiaotun, Oiler, Jon, Ziyu Wang, Yu, Hongyu, Wang, Ziyu, Xiaotun Qiu, Tang, Rui, Zhu, Jie   +11 more
core   +1 more source

Electrically tunable and switchable film bulk acousitc resonator

, 2005
This paper describes an electrically tunable and switchable film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator.
Kim, Eun Sok, Yu, Hongyu, Zhang, Hao, Pang, Wei   +3 more
core   +1 more source

Development of tunable film bulk acoustic wave resonator (FBAR) utilizing BiFeO3-BaTiO3 multiferroics

, 2012
This thesis aims at improving the performance of novel (1-x)BiFeO3-xBaTiO3 multiferroic based tunable film bulk acoustic resonator (FBAR) up to the desired level of practical applications by optimizing material compositions and film growth conditions ...
Xie, Minshu
core   +1 more source

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation. [PDF]

Sensors (Basel), 2023
Patel R, Adhikari MS, Tripathi SK, Sahu S.   +3 more
europepmc   +1 more source

Investigation of area-dependent high-power failure of film bulk acoustic resonators. [PDF]

Microsyst Nanoeng
Wei Y, Mu D, Wang W, Gao F, Xuan W, Jin H, Luo J, Dong S.   +7 more
europepmc   +1 more source

C-Axis Oriented LiNbO₃ Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications. [PDF]

Sensors (Basel)
Smagin N, Bui TNK, Oumekloul Z, Moalla R, Maudez W, Wagner E, Duquennoy M, Mathlouthi RK, Deblock Y, Dahmani H, Remiens D, Carlier J, Benvenuti G.   +12 more
europepmc   +1 more source