Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene). [PDF]
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Design and modelling of thin film bulk acoustic resonator (FBAR) for RF application
Materials Today: Proceedings, 2023Subrahamanyam Upadhyay
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Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR.
Xiaotun Qiu, Hongyu Yu
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Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, 2008PurposeThe paper aims to propose a three‐dimensional (3D) finite element analysis to evaluate the electrical performances of a FBAR (thin‐film bulk acoustic resonator) resonator.Design/methodology/approachThe piezoelectric theory that uses an equivalent circuit is able to evaluate the thickness‐extensional vibration modes in simple 1D configuration but
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Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010This paper described relative humidity (RH) sensing with ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased in the environment. For low RH (RH 50%), a frequency shift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water ...
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