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Low Phase Noise, Dual-Frequency Pierce MEMS Oscillators with Direct Print Additively Manufactured Amplifier Circuits. [PDF]

open access: yesMicromachines (Basel)
Li L   +8 more
europepmc   +1 more source
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Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR.
Xiaotun Qiu, Hongyu Yu
exaly   +2 more sources

Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, 2008
PurposeThe paper aims to propose a three‐dimensional (3D) finite element analysis to evaluate the electrical performances of a FBAR (thin‐film bulk acoustic resonator) resonator.Design/methodology/approachThe piezoelectric theory that uses an equivalent circuit is able to evaluate the thickness‐extensional vibration modes in simple 1D configuration but
BUCCELLA, CONCETTINA   +3 more
openaire   +1 more source

Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
This paper described relative humidity (RH) sensing with ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased in the environment. For low RH (RH 50%), a frequency shift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water ...
Xiaotun Qiu   +5 more
openaire   +1 more source

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