Results 121 to 130 of about 1,189 (200)

Acoustic Signal-Based Piezoelectric Thin-Film Microbalance: A Versatile and Portable Platform for Biomedical Sensing and Point-of-Care Testing. [PDF]

Biosensors (Basel)
Zhao B, Li X, Shi J, Liu H.
europepmc   +1 more source

Thin-film bulk acoustic wave resonators - FBAR: fabrication, heterogeneous integration with CMOS technologies and sensor applications

, 2008
The high impact of FBAR on radio-frequency and, most recently, on sensing systems has motivated the development of integrated applications. This means that the fabrication process should succeed in producing high-quality-factor resonators and, at the same time, in integrating FBARs with standard CMOS technologies. Hence, this Ph.D.
openaire   +1 more source

A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration. [PDF]

Microsyst Nanoeng
Xu J, Ren Z, Qian F, Zheng J, Yang Y.
europepmc   +1 more source

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator. [PDF]

Micromachines (Basel), 2022
Gao C, Zou Y, Zhou J, Liu Y, Liu W, Cai Y, Sun C.   +6 more
europepmc   +1 more source

Porous silicon bulk acoustic wave resonator with integrated transducer [PDF]

, 2012

core   +1 more source

5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications. [PDF]

Microsyst Nanoeng
Yang T, Gao C, Wang Y, Lin B, Zheng Y, Liu Y, Lei C, Sun C, Cai Y.   +8 more
europepmc   +1 more source

BAW Resonator with an Optimized SiO₂/Ta₂O₅ Reflector for 5G Applications. [PDF]

ACS Omega, 2022
Lv L, Shuai Y, Huang S, Zhu D, Wang Y, Luo W, Wu C, Zhang W.   +7 more
europepmc   +1 more source

Progress in RF-MEMS. [PDF]

Micromachines (Basel)
Tait RN.
europepmc   +1 more source

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications. [PDF]

Micromachines (Basel), 2021
Nair MP, Teo AJT, Li KHH.
europepmc   +1 more source

Towards the Optimization of Apodized Resonators. [PDF]

Micromachines (Basel)
Valenzuela-Pérez A, Collado C, Mateu J.
europepmc   +1 more source