Results 121 to 130 of about 316 (158)

Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications

Radio and Wireless Conference, 2003. RAWCON '03. Proceedings, 2004
In this paper, we present the effects of the thermal annealing of the W/SiO/sub 2/ multi-layer Bragg reflectors on the resonance characteristics of the ZnO-based film bulk acoustic resonator (FBAR) devices and the use of the cobalt (Co) electrodes instead of the aluminum (Al) electrodes to optimize the FBAR for RF filter applications.
null Munhyuk Yim, null Dong-Hyun Kim, null Dongkyu Chai, null Junpil Jung, null Jinseok Park, null Giwan Yoon   +5 more
openaire   +1 more source

Sensitivity of thin-film bulk acoustic resonators (FBAR) to localized mechanical forces

Journal of Micromechanics and Microengineering, 2013
We report on the sensitivity of thin-film bulk acoustic resonators (FBARs) to localized contact mechanical forces, their design for high sensitivity and the performance under different forcing conditions and mechanisms. Cantilever and membrane structures are the examples chosen for structure and process flow design, finite element modeling and ...
H Campanella, C J Camargo, J Esteve, J M Tsai   +3 more
openaire   +1 more source

Extraction of Material Parameters in Film Bulk Acoustic Resonator (FBAR) Using Genetic Algorithm

IEEE Electron Device Letters, 2004
The extraction of material parameters from the given (or measured) input impedance of film bulk acoustic resonators (FBARs) using a genetic algorithm (GA) is proposed. After studying the effect of material parameter changes on impedance responses, resonance characteristics of FBARs are used to extract the material parameters.
J. Lee, J. Jung, J.-I. Park, H. Kim
openaire   +1 more source

Resonant properties of thin film bulk acoustic resonator (FBARs) with considering the two dimensional size effects

2013 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, 2013
The piezoelectric thin film bulk acoustic resonators (FBARs) is a new kind frequency devices, which has exhibited several prominent advantages. In this paper, the typical models of FBAR are established to analyze modal resonance frequency with ANSYS codes. The results for the modal resonance frequencies vs. width-to-thickness aspect ratio were obtained.
Xin-Yi Luo, De-Jin Huang, Wen-Liang Zhang, Ji Wang   +3 more
openaire   +1 more source

Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes

2010 IEEE International Ultrasonics Symposium, 2010
FBAR devices with carbon nanotube (CNT) electrodes have been developed withthe aim of taking advantage of the low density and high acoustic impedance ofthe CNTs compared to other known materials. The influence of the CNTs on thefrequency response of the FBAR devices was studied by comparing two identicalsets of devices, one set comprised FBARs ...
Garcia-Gancedo, L., Al-Naimi, F., Flewitt, A. J., Milne, W. I., Ashley, G. M., Luo, J. K., Zhao, X. B., Lu, J. R.   +7 more
openaire   +3 more sources

Enabling the 5G: Modelling and Design of High Q Film Bulk Acoustic Wave Resonator (FBAR) for High Frequency Applications

2020 IEEE International Symposium on Circuits and Systems (ISCAS), 2020
Micro-electromechanical systems (MEMs) started to dominate the interests of the industry due to the high growth of the various radio frequency (RF) systems, such as mobile telecommunication, satellite communication and other wireless devices that accrues high frequency range. In addition to the race of miniaturizing the device feature size.
Nourhan Ashraf, Yasmin Mesbah, Aya Emad, Hassan Mostafa   +3 more
openaire   +1 more source

Thermal Analysis and Characterization of a High Q Film Bulk Acoustic Resonator (FBAR) as Biosensers in Liquids

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009
This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic ...
Xu Zhang, Wencheng Xu, Abbas Abbaspour-Tamijani, Junseok Chae   +3 more
openaire   +1 more source

AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Surface and Coatings Technology, 2010
A new type of biosensor device is here presented which is fabricated using the same processes used for the fabrication of integrated electrical circuits to enable tighter integration and further se ...
G Wingqvist
exaly   +2 more sources

Room Temperature Ozone Detection using ZnO based Film Bulk Acoustic Resonator (FBAR)

Journal of The Electrochemical Society, 2011
This study describes room temperature ozone sensing with a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of FBAR decreased upon ozone exposure. For 1400 ppb ozone, the frequency downshift was 131 kHz with a response time of 12 s.
Wang, Ziyu, Qiu, Xiaotun, Shi, Jin, Yu, Hongyu   +3 more
openaire   +2 more sources

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Journal of Micromechanics and Microengineering, 2007
A focused-ion-beam-assisted procedure with the aim of frequency tuning thin-film bulk acoustic resonators (FBARs) is presented. The procedures of focused-ion-beam-based deposition and milling on the FBAR are described, detailing calibration and alignment issues.
Humberto Campanella, Francisco Hernández-Ramírez, Albert Romano-Rodríguez, Josep Montserrat, Arantxa Uranga, Nuria Barniol, Jaume Esteve   +6 more
openaire   +1 more source