Results 121 to 130 of about 2,512,391 (143)

Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application. [PDF]

open access: yesMicrosyst Nanoeng
Wang L   +10 more
europepmc   +1 more source

Putting piezoelectric sensors into Fano resonances. [PDF]

open access: yesMicrosyst Nanoeng
Wang M, Huang J, Huang QA.
europepmc   +1 more source

Physical Sensors Based on Lamb Wave Resonators. [PDF]

open access: yesMicromachines (Basel)
Yu Z   +7 more
europepmc   +1 more source

Film Bulk Acoustic-Wave Resonator (FBAR) based ultraviolet sensor

open access: yes, 2009
This paper described ultraviolet (UV) radiation sensing using ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR.
Hongyu Yu
exaly   +2 more sources

Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor

open access: yes, 2010
This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device.
Hongyu Yu, Xiaotun Qiu
exaly   +2 more sources

High Q Single-Mode High-Tone Bulk Acoustic Resonator Integrated With Surface-Micromachined FBAR Filter

open access: yes, 2005
This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate.
Hongyu Yu
exaly   +4 more sources

Design and simulation of Film Bulk Acoustic Wave Resonator (FBAR) Gas Sensor Based on ZnO Thin Film [PDF]

open access: yes, 2019
The interest in miniature device has led to the development of thin film bulk acoustic wave resonator (FBAR). The function of a resonator to gain a high resonant frequency value of an equipment make FBAR is suitable to act as sensor and filter for wide ...
Aliza Aini Ralib, Jamilah Karim
exaly   +2 more sources

ZnO based film bulk acoustic resonator as infrared sensor

open access: yesThin Solid Films, 2011
This paper reported the investigation of an infrared (IR) sensitive, ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased under IR illumination, and results demonstrated a linear dependence on IR intensity.
Hongyu Yu, Xiaotun Qiu
exaly   +2 more sources

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