Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures [PDF]
MicromachinesThis study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries.
Binghui Lin +8 more
doaj +2 more sources
A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application [PDF]
Micromachines, 2017 This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator
Mengying Zhang +3 more
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Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices [PDF]
MicromachinesAcoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode.
Raju Patel +3 more
doaj +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
doaj +2 more sources
Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes
AIP Advances, 2016 A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator.
Zinan Zhao, Zhenghua Qian, Bin Wang
doaj +2 more sources
Design of a New Step-like Frame FBAR for Suppression of Spurious Resonances [PDF]
Radioengineering, 2013 Film bulk acoustic wave resonators (FBARs) are of great interest for wireless applications due to its inherent advantages at microwave frequencies. However, the presence of spurious modes near the main resonance degrades the performance of resonators and
P. Kumar, C. C. Tripathi
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A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration [PDF]
Microsystems & NanoengineeringThis study presents a wafer-level sealed silicon cavity (SSC) microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator (C-SOI) wafers for the 5G/6G wireless communication system.
Jiashuai Xu +4 more
doaj +2 more sources
Design and Optimization of a BAW Microphone Sensor
Micromachines, 2022 A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology.
Huihui Guo +4 more
doaj +1 more source
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications
Microsystems & Nanoengineering, 2022 Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process.
Yang Zou +9 more
doaj +1 more source
Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals
物联网学报, 2022 A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high ...
Linhao SHI +5 more
doaj +2 more sources