The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid [PDF]
Micromachines, 2016 A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method.
Da Chen, Weihui Liu
exaly +5 more sources
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator. [PDF]
Micromachines (Basel), 2023 The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance.
Qu Y +9 more
europepmc +3 more sources
High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector. [PDF]
Sensors (Basel), 2022 A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance.
Hu Y, Dong B, Lei L, Wang Z, Ruan S.
europepmc +3 more sources
Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation. [PDF]
Sensors (Basel), 2023 In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications.
Patel R +3 more
europepmc +3 more sources
Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator. [PDF]
Micromachines (Basel), 2022 As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance.
Gao C +6 more
europepmc +3 more sources
Flexible Film Bulk Acoustic Resonator Based on Low-Porosity β-Phase P(VDF-TrFE) Film for Human Vital Signs Monitoring. [PDF]
Sensors (Basel), 2023 P(VDF-TrFE) is a promising material for flexible acoustic devices owing to its good piezoelectric performance and excellent stretchability. However, the high density of internal pores and large surface roughness of the conventional P(VDF-TrFE) results in
Yu Z +6 more
europepmc +3 more sources
A Flexible Film Bulk Acoustic Resonator Based on -Phase Polyvinylidene Fluoride Polymer. [PDF]
Sensors (Basel), 2020 This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on β -phase polyvinylidene fluoride (PVDF) piezoelectric polymer.
Wu T +11 more
europepmc +3 more sources
ZnO Film Bulk Acoustic Resonator for the Kinetics Study of Human Blood Coagulation. [PDF]
Sensors (Basel), 2017 Miniaturized and rapid blood coagulation assay technologies are critical in many clinical settings. In this paper, we present a ZnO film bulk acoustic resonator for the kinetic analysis of human blood coagulation.
Chen D, Zhang Z, Ma J, Wang W.
europepmc +3 more sources
A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application [PDF]
Micromachines (Basel), 2017 This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator
Zhang M, Du L, Fang Z, Zhao Z.
europepmc +3 more sources
Polyimide-Based High-Performance Film Bulk Acoustic Resonator Humidity Sensor and Its Application in Real-Time Human Respiration Monitoring. [PDF]
Micromachines (Basel), 2022 Respiration monitoring is vital for human health assessment. Humidity sensing is a promising way to establish a relationship between human respiration and electrical signal.
Zhu Y +5 more
europepmc +2 more sources