Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes
AIP Advances, 2016 A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator.
Zinan Zhao, Zhenghua Qian, Bin Wang
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Impedance‐Matched High‐Overtone Thickness‐Shear Bulk Acoustic Resonators With Scalable Mode Volume [PDF]
Advanced ScienceHigh‐overtone bulk acoustic resonators (HBARs) are widely used in microwave signal processing due to their high quality factors and multimode resonances. However, conventional HBARs often suffer from impedance mismatch at metal interfaces, spurious modes,
Zi‐Dong Zhang +7 more
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An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators
Nanotechnology and Precision Engineering, 2018 : This paper investigates the issues on acoustic energy reflection of flexible film bulk acoustic resonators (FBARs). The flexible FBAR was fabricated with an air cavity in the polymer substrate, which endowed the resonator with efficient acoustic ...
Chuanhai Gao +4 more
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Acoustofluidic Biosensors [PDF]
MicromachinesThe rapid and precise detection of biomarkers and pathogens remains a critical challenge in clinical diagnostics. Traditional methodologies are frequently hindered by protracted workflows, complex sample preparation, and reliance on resource-intensive ...
Chun-Jui Chen +2 more
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A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application [PDF]
Micromachines, 2017 This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator
Mengying Zhang +3 more
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Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures [PDF]
MicromachinesThis study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries.
Binghui Lin +8 more
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Multi-mode piezoelectric radiation-based microantennas and miniaturized wireless sensing unit driven by bulk acoustic waves [PDF]
Nature CommunicationsWireless sensing systems enable real-time, non-contact monitoring for next-generation intelligent platforms. Ideal wireless sensing systems feature compact, low power consumption, and long communication range.
Xinyu Cai +14 more
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Integration of sol-gel frequency agile materials for tunable RF devices [PDF]
, 2012 This thesis focuses on the use of high permittivity tunable dielectrics and more specifically sol-gel ferroelectric thin films for low cost, high performance tunable devices such as varactors and filters at RF and microwave frequencies.
Fragkiadakis, Charalampos
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Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices [PDF]
MicromachinesAcoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode.
Raju Patel +3 more
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, 2004 A sensor and methods for making and using the same in which a mechanical resonator is employed, comprising a resonator portion for resonating in a fluid without the substantial generation of acoustic waves; and an electrical connection between the ...
Padowitz, David +2 more
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