Multi-mode piezoelectric radiation-based microantennas and miniaturized wireless sensing unit driven by bulk acoustic waves. [PDF]
Nat CommunWireless sensing systems enable real-time, non-contact monitoring for next-generation intelligent platforms. Ideal wireless sensing systems feature compact, low power consumption, and long communication range.
Cai X +14 more
europepmc +2 more sources
AIP Advances, 2021 Patterned piezoelectric films as inter-digital transducer (PP-IDT) structures on diamond substrates have been attracting extensive attention due to the increased working frequency, electromechanical coupling, and quality factor of piezoelectric devices ...
B. W. Xie +6 more
doaj +1 more source
Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis. [PDF]
, 2006 A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals.
Zhu, Meiling, Kirby, Paul B.
core +1 more source
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Journal of microelectromechanical systems, 2020 This work reports on the first demonstration of the frequency tuning and intrinsic polarization switching of film bulk acoustic resonators (FBARs), based on sputtered AlScN piezoelectric thin films with Sc/(Al + Sc) ratio of approx. 30%.
Jialin Wang +5 more
semanticscholar +1 more source
A film bulk acoustic resonator pressure sensor based on lateral field excitation
International Journal of Distributed Sensor Networks, 2018 A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids.
Shujing Su +4 more
doaj +1 more source
FlexMEMS-enabled hetero-integration for monolithic FBAR-above-IC oscillators
Nanotechnology and Precision Engineering, 2019 In this work, a monolithic oscillator chip is heterogeneously integrated by a film bulk acoustic resonator (FBAR) and a complementary metal-oxide-semiconductor (CMOS) chip using FlexMEMS technology.
Chuanhai Gao, Menglun Zhang, Yuan Jiang
doaj +1 more source
Analysis and Enhancement of Q-Factor in Thin-Film Bulk Acoustic Wave Resonator (FBAR)
Journal of Physics: Conference Series, 2022 In MEMS technology, MEMS Resonators has shown high potential applications in wireless communications such as Bluetooth and WIFI range. The Bulk Acoustic Wave (BAW) Resonator is a device which has more potential to meet the needs of today’s wireless ...
P. Joshi, K. Latwe, M. Hasamnis
semanticscholar +1 more source
CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing [PDF]
Sensors, 2010 The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators.
Nirschl, M. +8 more
openaire +8 more sources
A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications
Micromachines, 2015 Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of
Zhixin Zhang +4 more
doaj +1 more source
Sensors, 2020 The influence of humidity on the density, shear elastic module, viscosity, and thickness of the mushroom Pleurotus eryngii and Ganoderma lucidum mycelium films was studied.
Iren Kuznetsova +8 more
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