Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy [PDF]
Micromachines, 2017 The very small vibration of a solidly-mounted resonator (SMR) in fluid may trigger a relatively large motion of the covering fluid, which was implied by our protein-related experimental results.
Fei Xu +6 more
doaj +4 more sources
Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film [PDF]
Micromachines, 2021 This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously ...
Zhen-Hui Qin +6 more
doaj +4 more sources
Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators [PDF]
Micromachines, 2023 Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the ...
Carlos Udaondo +2 more
doaj +2 more sources
Solidly Mounted Resonator (SMR) Sensors for Biomedical Applications [PDF]
Proceedings, 2020 Biosensors play a key role in medical diagnostics, and acoustic wave technology such as solidly mounted resonators (SMRs) applied to this field is one of the latest developments with great potential.
Siavash Esfahani +4 more
doaj +2 more sources
Solidly mounted resonator sensor for biomolecule detections. [PDF]
RSC Adv, 2019 We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules.
Han C +8 more
europepmc +4 more sources
Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications [PDF]
BMC Chemistry, 2019 AlN films were deposited on Si substrates using a reactive RF magnetron sputtering process and then the films were annealed by using different laser powers and wavelengths (355 nm, 532 nm and 1064 nm).
H. K. Lin +4 more
doaj +2 more sources
Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators [PDF]
Micromachines, 2021 In this work, three-dimensional finite element analysis (3D FEA) of quasi-surface acoustic wave (QSAW) resonators with high accuracy is reported. The QSAW resonators consist of simple molybdenum (Mo) interdigitated transducers (IDT) on solidly mounted ...
Wen Chen +7 more
doaj +2 more sources
High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure [PDF]
SensorsBulk acoustic wave (BAW) resonators, with their exceptional high-frequency performance and excellent quality factor, have become a key driver of advances in sensing technology.
Wanqing Zuo +6 more
doaj +2 more sources
Particle Sensor Using Solidly Mounted Resonators [PDF]
IEEE Sensors Journal, 2015 This paper describes the development of a novel particle sensing system employing zinc oxide based solidly mounted resonator (SMR) devices for the detection of airborne fine particles (i.e., PM2.5 and PM10). The system operates in a dual configuration in
Cole, Marina +5 more
core +3 more sources
Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination [PDF]
SensorsSensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications.
José Manuel Carmona-Cejas +4 more
doaj +2 more sources