Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy [PDF]
Micromachines, 2017 The very small vibration of a solidly-mounted resonator (SMR) in fluid may trigger a relatively large motion of the covering fluid, which was implied by our protein-related experimental results.
Fei Xu +6 more
doaj +4 more sources
Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators [PDF]
Micromachines, 2023 Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the ...
Carlos Udaondo +2 more
doaj +2 more sources
Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film [PDF]
Micromachines, 2021 This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously ...
Zhen-Hui Qin +6 more
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Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications [PDF]
BMC Chemistry, 2019 AlN films were deposited on Si substrates using a reactive RF magnetron sputtering process and then the films were annealed by using different laser powers and wavelengths (355 nm, 532 nm and 1064 nm).
H. K. Lin +4 more
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High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure [PDF]
SensorsBulk acoustic wave (BAW) resonators, with their exceptional high-frequency performance and excellent quality factor, have become a key driver of advances in sensing technology.
Wanqing Zuo +6 more
doaj +2 more sources
Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators [PDF]
Micromachines, 2021 In this work, three-dimensional finite element analysis (3D FEA) of quasi-surface acoustic wave (QSAW) resonators with high accuracy is reported. The QSAW resonators consist of simple molybdenum (Mo) interdigitated transducers (IDT) on solidly mounted ...
Wen Chen +7 more
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Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination [PDF]
SensorsSensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications.
José Manuel Carmona-Cejas +4 more
doaj +2 more sources
Towards the Optimization of Apodized Resonators [PDF]
MicromachinesBulk Acoustic Wave (BAW) resonators are essential components in modern RF communication systems due to their high selectivity and quality factor. However, spurious resonances caused by Lamb wave mode propagation along the in-plane directions degrade the ...
Ana Valenzuela-Pérez +2 more
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Single and Dual Mode SMR Sensors for Pest Detection in Plant Health Monitoring [PDF]
SensorsThis study presents the development and evaluation of surface functionalized solidly mounted resonators (SMRs), including custom developed at the University of Warwick (UWAR) devices and commercial Sorex sensors, for the detection and classification of ...
Usman Yaqoob +4 more
doaj +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
doaj +2 more sources