Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors [PDF]
, 2016 We present the direct comparison of the performance of two gravimetric biosensors based on acoustic resonators, a quartz crystal microbalance and a high frequency AlN-based bulk acoustic wave film solidly mounted resonator (SMR).
Clement Lorenzo, Marta +5 more
core +2 more sources
Indoor air quality monitor based on Solidly Mounted Resonators for the detection of VOCs [PDF]
, 2017 This work describes the development of an indoor air quality monitor based on high frequency solidly mounted resonators (SMR) for the detection of volatile organic compounds (V OC).
Cole, Marina +3 more
core +1 more source
A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs) [PDF]
, 2009 The quality factor of the traditional Solidly Mounted Resonator (SMR) is limited by substrate losses, as the traditionally employed acoustic mirror reflects longitudinal waves but not shear waves.
Hueting, R.J.E. +2 more
core +4 more sources
On the lateral excitation of shear modes in AlN layered resonators [PDF]
, 2012 In this paper we describe the fabrication and frequency characterization of different structures intended for the lateral excitation of shear modes in AlN c-axis-oriented films, which are at the same time designed to minimize the excitation of ...
Capilla Osorio, José +5 more
core +1 more source
Characterization of energy trapping in a bulk acoustic wave resonator [PDF]
, 2010 Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic waveresonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer.
Graebner J. E. +7 more
core +1 more source
Solidly mounted resonators aging under harsh environmental conditions
Journal of Physics: Conference Series, 2006 A contribution to reliability studies of Solidly Mounted Resonators (SMR) submitted to harsh environments such as temperature and humidity is presented. Electrical, structural and chemical monitoring of representative parameters is performed by means of RF, DC characterizations and also X-ray diffraction coupled to X-fluorescence to assess aging in ...
Ivira, B. +6 more
openaire +4 more sources
High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors [PDF]
, 2012 This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range.
Capilla Osorio, José +5 more
core +2 more sources
A low-cost acoustic microsensor based system in package for air quality monitoring [PDF]
, 2017 In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates.
Cole, Marina +5 more
core +1 more source
Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators
Proceedings, 2017 Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by
Michael Schneider +4 more
doaj +1 more source
Ladder filter based on microelectronic BAW solidly mounted resonators
2017 Dynamics of Systems, Mechanisms and Machines (Dynamics), 2017 The ladder filters based on microelectronic BAW resonators with a Bragg reflector are designed. The BAW resonator represents a piezoelectric transducer based on zinc oxide films with thin-film electrodes of aluminum films and a Bragg reflector consisting of four pairs Mo-Al and one pair Mo-SiO 2 . The ladder filter topology based on the single T-shaped
T. N. Torgash, A. G. Kozlov
openaire +1 more source