Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy [PDF]
Micromachines, 2017 The very small vibration of a solidly-mounted resonator (SMR) in fluid may trigger a relatively large motion of the covering fluid, which was implied by our protein-related experimental results.
Fei Xu +6 more
doaj +4 more sources
Solidly Mounted Resonator (SMR) Sensors for Biomedical Applications [PDF]
Proceedings, 2020 Biosensors play a key role in medical diagnostics, and acoustic wave technology such as solidly mounted resonators (SMRs) applied to this field is one of the latest developments with great potential.
Siavash Esfahani +4 more
doaj +2 more sources
A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs) [PDF]
2009 IEEE International Ultrasonics Symposium, 2009 The quality factor of the traditional Solidly Mounted Resonator (SMR) is limited by substrate losses, as the traditionally employed acoustic mirror reflects longitudinal waves but not shear waves. Modern mirrors do reflect both waves, but design rules for such mirrors have not been published so far. We propose a systematic design procedure derived from
Jose, Sumy +2 more
openaire +6 more sources
High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure [PDF]
SensorsBulk acoustic wave (BAW) resonators, with their exceptional high-frequency performance and excellent quality factor, have become a key driver of advances in sensing technology.
Wanqing Zuo +6 more
doaj +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
doaj +2 more sources
Single and Dual Mode SMR Sensors for Pest Detection in Plant Health Monitoring [PDF]
SensorsThis study presents the development and evaluation of surface functionalized solidly mounted resonators (SMRs), including custom developed at the University of Warwick (UWAR) devices and commercial Sorex sensors, for the detection and classification of ...
Usman Yaqoob +4 more
doaj +2 more sources
Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators. [PDF]
Micromachines (Basel), 2023 Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the ...
Udaondo C, Collado C, Mateu J.
europepmc +3 more sources
Porous silicon bulk acoustic wave resonator with integrated transducer. [PDF]
Nanoscale Res Lett, 2012 We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties
Aliev GN +5 more
europepmc +5 more sources
Oven-Controlled Dual-Mode Solidly Mounted Resonator (SMR)-Based Biosensor [PDF]
IEEE Sensors JournalAcoustic resonators have been widely investigated in the last decade for potential applications in biosensing owing to their compactness, low cost, ultrahigh sensitivities, and robustness. These resonators employ piezoelectric films in the thickness range of 0.6– $2~\mu $ m, enabling them to operate at high frequencies between 0.8 and 4 GHz.
Alkausil Tamboli +4 more
openaire +3 more sources
Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators [PDF]
Proceedings, 2017 Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by
Michael Schneider +4 more
doaj +4 more sources