Particle Sensor Using Solidly Mounted Resonators [PDF]
This paper describes the development of a novel particle sensing system employing zinc oxide based solidly mounted resonator (SMR) devices for the detection of airborne fine particles (i.e., PM2.5 and PM10). The system operates in a dual configuration in
Cole, Marina +5 more
core +2 more sources
Bacteria detection with high-frequency gravimetric biosensors based on AlN thin film resonators [PDF]
Gravimetric sensors based on shear-mode resonators are suitable for in-liquid detection of biological species because their quality factors barely decrease during in-liquid operation.
Clement Lorenzo, Marta +6 more
core +2 more sources
Experimental comparison of FBARs and SMRs responsitivities to mass loadings [PDF]
The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice
Capilla Osorio, José +8 more
core +1 more source
Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators [PDF]
This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insulating acoustic reflectors and operating at around 8 GHz.
Capilla Osorio, José +4 more
core +1 more source
Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors [PDF]
This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended as high impedance films for the acoustic isolation of bulk acoustic wave devices operating in the GHz frequency range.
Capilla Osorio, José +5 more
core +3 more sources
Indoor Air Quality CO2 Thermally Modulated SMR Sensor
This paper reports on a CO2 solidly mounted resonator (SMR)-based sensor with an integrated heater. The SMR device is CMOS compatible and operates at a resonant frequency of 2 GHz.
Siavash Esfahani +4 more
doaj +1 more source
Analysis of spurious peaks at series resonance in solidly mounted resonators by combined BVD-Mason modelling [PDF]
Solidly Mounted Resonators (SMRs) for high frequency RF filters and sensing applications often display spurious resonances that distort their frequency response.
Carmona Cejas, Jose Manuel +6 more
core +1 more source
Tunable thin film bulk acoustic wave resonators with improved Q-factor [PDF]
The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized.
Gevorgian, Spartak, Vorobiev, Andrei
core +1 more source
Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications [PDF]
The work reported here shows a direct experimental comparison of the sensitivities of AlN solidly mounted resonators (SMR)-based biosensors fabricated with standard metal electrodes and with carbon nanotube electrodes.
, +13 more
core +2 more sources
Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators [PDF]
We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium electrodes for electroacoustic devices operating in the super high frequency range. Superior crystal quality and low stress films with thicknesses as low as 160 nm are
Capilla Osorio, José +4 more
core +2 more sources

