Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film. [PDF]
Qin ZH +6 more
europepmc +2 more sources
Solidly mounted resonator sensor for biomolecule detections. [PDF]
Han C +8 more
europepmc +2 more sources
Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators [PDF]
Mechanical and electrical losses induced by an electrode material greatly influence the performance of bulk acoustic wave (BAW) resonators. Graphene as a conducting and virtually massless 2D material is a suitable candidate as an alternative electrode material for BAW resonators which reduces electrode induced mechanical losses.
Marius Knapp +4 more
openaire +3 more sources
Third-Harmonic and intermodulation distortion in bulk acoustic-wave resonators [PDF]
This article discusses on the measured third-order intermodulation (IMD3) products and third harmonics (H3) appearing in a set of six different solidly mounted resonators (SMR) and bulk acoustic-wave (BAW) resonators with different shapes and stack ...
Aigner, Robert +3 more
core +2 more sources
Indoor air quality monitor based on Solidly Mounted Resonators for the detection of VOCs [PDF]
This work describes the development of an indoor air quality monitor based on high frequency solidly mounted resonators (SMR) for the detection of volatile organic compounds (V OC).
Cole, Marina +3 more
core +1 more source
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors [PDF]
We present the direct comparison of the performance of two gravimetric biosensors based on acoustic resonators, a quartz crystal microbalance and a high frequency AlN-based bulk acoustic wave film solidly mounted resonator (SMR).
Clement Lorenzo, Marta +5 more
core +2 more sources
A low-cost acoustic microsensor based system in package for air quality monitoring [PDF]
In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates.
Cole, Marina +5 more
core +1 more source
Optimized reflector stacks for solidly mounted bulk acoustic wave resonators [PDF]
The quality factor (Q) of a solidly mounted bulk acoustic wave resonator (SMR) is limited by substrate losses, because the acoustic mirror is traditionally optimized to reflect longitudinal waves only.
Hueting, Raymond J.E. +3 more
core +3 more sources
On the lateral excitation of shear modes in AlN layered resonators [PDF]
In this paper we describe the fabrication and frequency characterization of different structures intended for the lateral excitation of shear modes in AlN c-axis-oriented films, which are at the same time designed to minimize the excitation of ...
Capilla Osorio, José +5 more
core +1 more source
High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors [PDF]
This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range.
Capilla Osorio, José +5 more
core +2 more sources

