Results 151 to 160 of about 2,725 (194)
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Diffraction And Detection Of Bulk Acoustic Waves (BAW)
SPIE Proceedings, 1985Operation of a bulk acoustic wave (BAW) spectrum analyzer is similar to a coherent optical Fourier transformer. In our experimental device an array of phased acoustic transducers serves as a coherent radiation source as well as spatial modulator.
F. Sabet-Peyman, I. C. Chang
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Integrated approach to electrode and AlN depositions for bulk acoustic wave (BAW) devices
Microelectronic Engineering, 2003This paper investigates the (002) texture of AlN films deposited by reactive pulsed direct current sputtering on Al, Al-Cu, W and Mo metal electrodes. X-Ray diffraction and atomic force microscopy studies show that the AlN texture is dependent on the deposition conditions and nature of the underlayers.
R. Jakkaraju +5 more
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A bulk acoustic wave(BAW)-based sensor node for automotive wireless sensor networks
e & i Elektrotechnik und Informationstechnik, 2008The following paper presents a 2.1 GHz transceiver, which makes use of BAW resonators to replace the external quartz crystal and the external band select filter. It has been fabricated in a 130 nm CMOS process and has a power consumption of 5 mA.
M. Flatscher +6 more
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Development of high-frequency bulk acoustic wave (BAW) resonators as biosensors and bioactuators
2017 IEEE International Electron Devices Meeting (IEDM), 2017Using of bulk acoustic wave resonators for biosensing applications grows rapidly in recent years. In this review, we summarized the recent trend developing of these devices for biodetection from two aspects: 1) as biosensors to provide label-free measurement of biomarkers.
X. Duan, S. Pan, W. Pang
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The Analyst, 2001
This paper describes the construction of an anion-selective bulk acoustic wave (BAW) sensor for the direct determination of phenytoin sodium for the first time. Based on the sensitive mass response of a piezoelectric quartz crystal (PQC) and selective adsorption-desorption across the modified film, the BAW sensor was fabricated by coating a ...
Y, Long, Y, Liu, L, Lei, L, Nie, S, Yao
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This paper describes the construction of an anion-selective bulk acoustic wave (BAW) sensor for the direct determination of phenytoin sodium for the first time. Based on the sensitive mass response of a piezoelectric quartz crystal (PQC) and selective adsorption-desorption across the modified film, the BAW sensor was fabricated by coating a ...
Y, Long, Y, Liu, L, Lei, L, Nie, S, Yao
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A Bulk Acoustic Wave (BAW) Based Transceiver for an In-Tire-Pressure Monitoring Sensor Node
IEEE Journal of Solid-State Circuits, 2010Attaching a tire pressure monitoring system (TPMS) on the inner liner of a tire allows sensing of important additional technical parameters, such as vehicle load or tire wearout. The maximum weight of the sensor is limited to 5 grams including package, power supply, and antenna. Robustness is required against extreme levels of acceleration.
Martin Flatscher +8 more
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Bulk acoustic wave (BAW) devices for stochastic cooling notch filters
Conference Record of the 1991 IEEE Particle Accelerator Conference, 2002Work on replacing all existing notch filters in the PBAR source with BAW notch filters is described. Three filters have been designed and built for the debuncher, thus eliminating the fiber optic filters. These have been installed since the fall of 1990. New filters for replacing the superconducting filters in the accumulator are now under construction.
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Study of angular gain in lobe-like modes for annular ring bulk acoustic wave (BAW) gyroscopes
2019 IEEE International Ultrasonics Symposium (IUS), 2019Wineglass modes are the modes of choice in bulk acoustic wave (BAW) micro-ring gyroscopes owing to their high angular gain and high quality factor in vacuum. The quality factors of most mechanical modes, including the wineglass modes, are significantly lower in liquid medium ambience. While acoustic damping in fluids adversely impacts quality factor in
Hrishikesh Iyer, Siddharth Tallur
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2019 IEEE International Ultrasonics Symposium (IUS), 2019
With the new 5G wireless communication standard on the horizon, new and formerly unused bands will be introduced with frequencies up to 6 GHz. BAW filters play a crucial role supporting those bands due to their tight guard-band and steep rejection requirements. This paper will elaborate on process and design challenges based on a 5.2GHz filter design.
Michael Schaefer +2 more
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With the new 5G wireless communication standard on the horizon, new and formerly unused bands will be introduced with frequencies up to 6 GHz. BAW filters play a crucial role supporting those bands due to their tight guard-band and steep rejection requirements. This paper will elaborate on process and design challenges based on a 5.2GHz filter design.
Michael Schaefer +2 more
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Thin Solid Films, 2006
Abstract 8 GHz range solidly mounted resonator (SMR) based on high quality direct current pulsed sputtered aluminum nitride (AlN) thin films have been fabricated on 100 mm diameter silicon wafer. Dispersion in AlN film thickness has been measured and on-wafer distribution of operating frequency, mechanical coupling and quality factor of the SMR has ...
F. Martin +4 more
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Abstract 8 GHz range solidly mounted resonator (SMR) based on high quality direct current pulsed sputtered aluminum nitride (AlN) thin films have been fabricated on 100 mm diameter silicon wafer. Dispersion in AlN film thickness has been measured and on-wafer distribution of operating frequency, mechanical coupling and quality factor of the SMR has ...
F. Martin +4 more
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