Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators [PDF]
This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insulating acoustic reflectors and operating at around 8 GHz.
Capilla Osorio, José +4 more
core +1 more source
Bulk acoustic wave affinity biosensor for genetically modified organisms detection
Bulk acoustic waves have been applied as affinity sensors. In particular, a nucleic acid sensor for hybridization studies has been developed and applied for detecting DNA target sequences in solution. A DNA probe is immobilized on the sensor surface while the target sequence is free in solution; the interaction between the two complementary strands ...
I. Mannelli +3 more
openaire +3 more sources
MBE‐Grown ScAlN‐on‐Si Films: Enhancing In‐Plane Crystallinity for Extensional Mode BAW Resonators
The achievement of in‐plane single crystallinity and a high piezoelectric modulus in epitaxially grown ScAlN films on AlN‐buffered Si (111) enables extensional mode ScAlN‐on‐Si bulk acoustic wave (BAW) resonators with an ultra‐high Q of ≈97k at 70.28 MHz, resulting in a frequency‐Q product of ≈6.86 × 1012, suitable for emerging wireless technologies ...
Shubham Mondal +9 more
wiley +1 more source
We report on the first observation of microvolt-scale inverse spin Hall effect (ISHE) dc voltage driven by an acoustic spin pumping (ASP) in a bulk acoustic wave (BAW) resonator formed by a Al-ZnO-Al-YIG(1)-GGG-YIG(2)-Pt structure.
N. I. Polzikova +5 more
doaj +1 more source
Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT
Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both ...
Ozan Erturk +4 more
doaj +1 more source
Rational Design and Fabrication of MEMS Gas Sensors With Long‐Term Stability: A Comprehensive Review
Recent advances in microelectromechanical systems (MEMS) gas sensors are reviewed, emphasizing strategies to enhance long‐term stability, including chemical modification of sensing films and device structural optimization. Key challenges and future opportunities are also highlighted.
Chao Zhang +6 more
wiley +1 more source
Acoustic Wave Engineering of Lamb Wave Resonators with 2D van der Waals Floating Electrode
AlN‐based Lamb wave resonators integrated with 2D hBN/graphene van der Waals heterostructures achieve fr exceeding 7 GHz and enhanced electromechanical coupling. The heterostructure functions as an acoustic mirror, effectively confining acoustic energy and minimizing losses, which significantly improves the Q‐factor.
Seok Hyun Yoon +2 more
wiley +1 more source
Resonant Ultrasonic Particle Manipulators and their Applications in Sensor Systems
The paper describes the use of ultrasonic standing waves as bulk acoustic wave actuators, exploiting the acoustic radiation forces within the standing wave to move biological cells or other particles.
Harris, N.R. +3 more
core +1 more source
Experimental comparison of FBARs and SMRs responsitivities to mass loadings [PDF]
The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice
Capilla Osorio, José +8 more
core +1 more source
Advanced Contactless Bioassembly Approaches: Leveraging Sound, Optical, and Magnetic Fields
This review explores innovative contactless bioassembly techniques driven by sound, light, and magnetic fields, which enable the precise organization of cells, biomaterials, and bioactive substances into complex 3D structures. These technologies, crucial for in vitro modeling and regenerative medicine, are examined in detail, highlighting their ...
Micaela Natta +4 more
wiley +1 more source

