Parameter Identification for Nonlinear Circuit Models of Power BAW Resonator
The large signal operation of the bulk acoustic wave (BAW) resonators is characterized by the amplitude-frequency effect and the intermodulation effect.
CONSTANTINESCU, F. +5 more
doaj +1 more source
Fabrication of Bulk Acoustic Wave Resonator with Multilayer Graphene Electrode
Herein, multilayer graphene structures are grown on the silicon substrate for the fabrication of the bulk acoustic wave resonator device. The result reveals that both methods can be used to replace the Bragg reflector. Two bulk acoustic wave resonator (BAW) devices with multilayer graphene as bottom electrodes are fabricated using the chemical vapor ...
Yuxuan Wang +3 more
wiley +1 more source
The Development of Micromachined Gyroscope Structure and Circuitry Technology
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated ...
Dunzhu Xia, Cheng Yu, Lun Kong
doaj +1 more source
Gigahertz thermoelastic acousto‐optic modulation in lithium niobate integrated photonic device
Abstract Tailoring the interaction between acoustic waves and optical waves in integrated photonic circuits has emerged as a promising avenue for quantum optics and high‐speed information processing. Among various approaches, on‐chip acousto‐optic modulation (AOM) has been extensively explored in the past decade and successfully demonstrated across ...
Zheng Zheng +5 more
wiley +1 more source
MBE‐Grown ScAlN‐on‐Si Films: Enhancing In‐Plane Crystallinity for Extensional Mode BAW Resonators
The achievement of in‐plane single crystallinity and a high piezoelectric modulus in epitaxially grown ScAlN films on AlN‐buffered Si (111) enables extensional mode ScAlN‐on‐Si bulk acoustic wave (BAW) resonators with an ultra‐high Q of ≈97k at 70.28 MHz, resulting in a frequency‐Q product of ≈6.86 × 1012, suitable for emerging wireless technologies ...
Shubham Mondal +9 more
wiley +1 more source
Aluminum nitride for thin film bulk acoustic wave resonators
We have developed a piezo electric aluminum nitride (AlN) deposition process which enables the manufacturing of bulk acoustic wave (BAW) resonators. The BAW devices may be used in numerous GHz frequency applications: Radio frequency filters in new mobile
Ylilammi, Markku +4 more
core +2 more sources
Physical Sensors Based on Lamb Wave Resonators
A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices.
Zixia Yu +7 more
doaj +1 more source
Modified Green's Functions for Shallow Water Acoustic Wave Propagation [PDF]
This article presents an assessment of alternative forms of the Green’s function for boundary element simulations of acoustic wave propagation in shallow water. It is assumed that the problem is two-dimensional, the source of acoustic disturbance is time-
Santiago, J A F S, Wrobel, L C
core +1 more source
A Gas Sensor Based on Fully Tuneable and Electrically Coupled Bulk Acoustic Wave Resonators
This paper reports on a gas sensor based on two bulk acoustic wave (BAW) resonators electrically coupled with a tuneable capacitor. The weak coupling strength was tuned to its optimal value (achieving maximum sensitivity) by varying the capacitance ...
Bernardo Madeira +3 more
doaj +1 more source
Mechanism of electrically tunable bulk acoustic wave resonator: Piezoelectric effect or acoustoelectric effect? [PDF]
This article presents a systematic investigation of electrically tunable bulk acoustic wave (BAW) resonators composed of piezoelectric and semiconductor composite layers, analyzed through the framework of multiphysics coupling.
Wenxuan Li +6 more
doaj +1 more source

