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Capacitive micromachined ultrasonic transducers

The Journal of the Acoustical Society of America, 2003
An ultrasonic transducer is formed by a plurality of cMUT cells (10), each comprising a charged diaphragm plate (14) capacitively opposing an oppositely charged base plate (12). The diaphragm plate (14) is distended toward the base plate (12) by a bias charge.
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Capacitive micromachined ultrasonic transducers and their application

2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263), 2002
Today's ultrasound technology covers a wide range of measurements, diagnostic, and other applications, e.g. from non-destructive testing to medical ultrasonic imaging or from surveillance in process plants to distance measurement. Capacitive micromachined ultrasonic transducers (cMUT) receive increasing acceptance as an alternative to piezoelectric ...
A. Buhrdorf, O. Ahrens, J. Binder
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Characterization of capacitive micromachined ultrasonic transducers

Microsystem Technologies, 2014
This paper describes numerical and experimental characterization of capacitive micromachined ultrasonic transducers (CMUTs) for ultrasound transmission. Simulations based on a finite elements method to model the electromechanical behaviour of CMUTs and to determine the dimensions of elementary cells are presented.
Bellaredj, Mohamed   +5 more
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Electromechanical coupling factor of capacitive micromachined ultrasonic transducers

The Journal of the Acoustical Society of America, 2003
Recently, a linear, analytical distributed model for capacitive micromachined ultrasonic transducers (CMUTs) was presented, and an electromechanical equivalent circuit based on the theory reported was used to describe the behavior of the transducer [IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 159–168 (2002)].
Alessandro, Caronti   +2 more
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Capacitive micromachined ultrasonic transducers for robotic sensing applications

Proceedings 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453), 2004
Ultrasonic ranging is the most common method used in robotic systems for distance or proximity sensing. The heart of the method is an ultrasonic transducer that emits and detects ultrasound. There are mainly two types of transducers existing in the market today; piezoelectric and electrostatic.
Göksenin G. Yaralioglu   +3 more
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Finite-element analysis of capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005
In this paper, we present the results of finite-element analysis performed to investigate capacitive micromachined ultrasonic transducers (CMUTs). Both three-dimensional (3-D) and 2-D models were developed using a commercially available finite-element modeling (FEM) software.
Goksen G, Yaralioglu   +2 more
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Finite element modeling of a capacitive micromachined ultrasonic transducer

Proceedings International Conference on MEMS, NANO and Smart Systems, 2004
Capacitive micromachined ultrasonic transducers have been investigated using finite element analysis. Three ANSYS models have been developed to illustrate the collapse voltage and operating frequency of CMUTs. A 2D axisymmetric model is used to illustrate the relationship between collapse voltage and electrode radius. The model agrees with past results
Bradley J. Kirchmayer   +2 more
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A new regime for operating capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2003
We report on a new operation regime for capacitive micromachined ultrasonic transducers (cMUTs). Traditionally, cMUTs are operated at a bias voltage lower than the collapse voltage of their membranes. In the new proposed operation regime, first the cMUT is biased past the collapse voltage.
Baris, Bayram   +3 more
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Capacitive micromachined ultrasonic transducer as a resonant temperature sensor

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013
The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method.
Zhikang Li   +5 more
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Radiated fields of capacitive micromachined ultrasonic transducers in air

The Journal of the Acoustical Society of America, 2003
This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs.
David A, Hutchins   +4 more
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