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Rotational capacitive micromachined ultrasonic transducers

2014 IEEE International Ultrasonics Symposium, 2014
A rotational capacitive micromachined ultrasonic transducer (RCMUT) for airborne ultrasound applications is presented. The device is comprised of two conventional parallel-plate CMUTs mechanically coupled via a pivoting-beam structure. The cavity beneath each CMUT piston is vacuum-sealed to reduce thermal-mechanical noise and unwanted air-film dynamics.
Donghwan Kim   +2 more
openaire   +1 more source

Characterization of capacitive micromachined ultrasonic transducers

Microsystem Technologies, 2014
This paper describes numerical and experimental characterization of capacitive micromachined ultrasonic transducers (CMUTs) for ultrasound transmission. Simulations based on a finite elements method to model the electromechanical behaviour of CMUTs and to determine the dimensions of elementary cells are presented.
Bellaredj, Mohamed   +5 more
openaire   +1 more source

Capacitive micromachined ultrasonic transducer as a resonant temperature sensor

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013
The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method.
Zhikang Li   +5 more
openaire   +2 more sources

Radiated fields of capacitive micromachined ultrasonic transducers in air

The Journal of the Acoustical Society of America, 2003
This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs.
David A, Hutchins   +4 more
openaire   +2 more sources

A new regime for operating capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2003
We report on a new operation regime for capacitive micromachined ultrasonic transducers (cMUTs). Traditionally, cMUTs are operated at a bias voltage lower than the collapse voltage of their membranes. In the new proposed operation regime, first the cMUT is biased past the collapse voltage.
Baris, Bayram   +3 more
openaire   +2 more sources

Capacitive micromachined ultrasonic transducers for robotic sensing applications

Proceedings 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453), 2004
Ultrasonic ranging is the most common method used in robotic systems for distance or proximity sensing. The heart of the method is an ultrasonic transducer that emits and detects ultrasound. There are mainly two types of transducers existing in the market today; piezoelectric and electrostatic.
Göksenin G. Yaralioglu   +3 more
openaire   +1 more source

Finite-element analysis of capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005
In this paper, we present the results of finite-element analysis performed to investigate capacitive micromachined ultrasonic transducers (CMUTs). Both three-dimensional (3-D) and 2-D models were developed using a commercially available finite-element modeling (FEM) software.
Goksen G, Yaralioglu   +2 more
openaire   +2 more sources

Electromechanical coupling factor of capacitive micromachined ultrasonic transducers

The Journal of the Acoustical Society of America, 2003
Recently, a linear, analytical distributed model for capacitive micromachined ultrasonic transducers (CMUTs) was presented, and an electromechanical equivalent circuit based on the theory reported was used to describe the behavior of the transducer [IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 159–168 (2002)].
Alessandro, Caronti   +2 more
openaire   +2 more sources

Finite element modeling of a capacitive micromachined ultrasonic transducer

Proceedings International Conference on MEMS, NANO and Smart Systems, 2004
Capacitive micromachined ultrasonic transducers have been investigated using finite element analysis. Three ANSYS models have been developed to illustrate the collapse voltage and operating frequency of CMUTs. A 2D axisymmetric model is used to illustrate the relationship between collapse voltage and electrode radius. The model agrees with past results
Bradley J. Kirchmayer   +2 more
openaire   +2 more sources

A multiscale model for array of capacitive micromachined ultrasonic transducers

The Journal of the Acoustical Society of America, 2010
A model is developed for studying the acoustic behavior of a cMUT array. This model is based on separate calculations of the terms describing the behavior of a single cMUT on one hand, and those corresponding to acoustic mutual coupling on the other hand. The terms are combined into an equivalent circuit with matrix terms which displays only one degree
Cyril, Meynier   +2 more
openaire   +2 more sources

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