Rotational capacitive micromachined ultrasonic transducers
2014 IEEE International Ultrasonics Symposium, 2014A rotational capacitive micromachined ultrasonic transducer (RCMUT) for airborne ultrasound applications is presented. The device is comprised of two conventional parallel-plate CMUTs mechanically coupled via a pivoting-beam structure. The cavity beneath each CMUT piston is vacuum-sealed to reduce thermal-mechanical noise and unwanted air-film dynamics.
Donghwan Kim +2 more
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Characterization of capacitive micromachined ultrasonic transducers
Microsystem Technologies, 2014This paper describes numerical and experimental characterization of capacitive micromachined ultrasonic transducers (CMUTs) for ultrasound transmission. Simulations based on a finite elements method to model the electromechanical behaviour of CMUTs and to determine the dimensions of elementary cells are presented.
Bellaredj, Mohamed +5 more
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Capacitive micromachined ultrasonic transducer as a resonant temperature sensor
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method.
Zhikang Li +5 more
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Radiated fields of capacitive micromachined ultrasonic transducers in air
The Journal of the Acoustical Society of America, 2003This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs.
David A, Hutchins +4 more
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A new regime for operating capacitive micromachined ultrasonic transducers
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2003We report on a new operation regime for capacitive micromachined ultrasonic transducers (cMUTs). Traditionally, cMUTs are operated at a bias voltage lower than the collapse voltage of their membranes. In the new proposed operation regime, first the cMUT is biased past the collapse voltage.
Baris, Bayram +3 more
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Capacitive micromachined ultrasonic transducers for robotic sensing applications
Proceedings 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453), 2004Ultrasonic ranging is the most common method used in robotic systems for distance or proximity sensing. The heart of the method is an ultrasonic transducer that emits and detects ultrasound. There are mainly two types of transducers existing in the market today; piezoelectric and electrostatic.
Göksenin G. Yaralioglu +3 more
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Finite-element analysis of capacitive micromachined ultrasonic transducers
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005In this paper, we present the results of finite-element analysis performed to investigate capacitive micromachined ultrasonic transducers (CMUTs). Both three-dimensional (3-D) and 2-D models were developed using a commercially available finite-element modeling (FEM) software.
Goksen G, Yaralioglu +2 more
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Electromechanical coupling factor of capacitive micromachined ultrasonic transducers
The Journal of the Acoustical Society of America, 2003Recently, a linear, analytical distributed model for capacitive micromachined ultrasonic transducers (CMUTs) was presented, and an electromechanical equivalent circuit based on the theory reported was used to describe the behavior of the transducer [IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 159–168 (2002)].
Alessandro, Caronti +2 more
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Finite element modeling of a capacitive micromachined ultrasonic transducer
Proceedings International Conference on MEMS, NANO and Smart Systems, 2004Capacitive micromachined ultrasonic transducers have been investigated using finite element analysis. Three ANSYS models have been developed to illustrate the collapse voltage and operating frequency of CMUTs. A 2D axisymmetric model is used to illustrate the relationship between collapse voltage and electrode radius. The model agrees with past results
Bradley J. Kirchmayer +2 more
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A multiscale model for array of capacitive micromachined ultrasonic transducers
The Journal of the Acoustical Society of America, 2010A model is developed for studying the acoustic behavior of a cMUT array. This model is based on separate calculations of the terms describing the behavior of a single cMUT on one hand, and those corresponding to acoustic mutual coupling on the other hand. The terms are combined into an equivalent circuit with matrix terms which displays only one degree
Cyril, Meynier +2 more
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