Results 171 to 180 of about 1,251 (192)

A multiscale model for array of capacitive micromachined ultrasonic transducers

The Journal of the Acoustical Society of America, 2010
A model is developed for studying the acoustic behavior of a cMUT array. This model is based on separate calculations of the terms describing the behavior of a single cMUT on one hand, and those corresponding to acoustic mutual coupling on the other hand. The terms are combined into an equivalent circuit with matrix terms which displays only one degree
Cyril, Meynier, Franck, Teston, Dominique, Certon   +2 more
openaire   +2 more sources

A solution to the charging problems in capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005
We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process based on the wafer-bonding technique.
Yongli, Huang, Edward O, Haeggström, Xuefeng, Zhuang, Arif S, Ergun, Butrus T, Khuri-Yakub   +4 more
openaire   +2 more sources

Response of capacitive micromachined ultrasonic transducers

SPIE Proceedings, 2008
Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for airborne ultrasonic applications, acoustic imaging, and chemical and biological detections. Much attention is also paid how to optimize their performance, so that the accurate simulation of the transmitting response of the CMUTs becomes extremely significant.
openaire   +1 more source

Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

Ultrasonics, 2008
In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage.
Yongli, Huang, Xuefeng, Zhuang, Edward O, Haeggstrom, A Sanli, Ergun, Ching-Hsiang, Cheng, Butrus T, Khuri-Yakub   +5 more
openaire   +2 more sources

Acoustic lens for capacitive micromachined ultrasonic transducers

Journal of Micromechanics and Microengineering, 2014
Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound.
Chienliu Chang, Kamyar Firouzi, Kwan Kyu Park, Ali Fatih Sarioglu, Amin Nikoozadeh, Hyo-Seon Yoon, Srikant Vaithilingam, Thomas Carver, Butrus T Khuri-Yakub   +8 more
openaire   +1 more source

Rotational Capacitive Micromachined Ultrasonic Transducers (cMUTs)

Journal of Microelectromechanical Systems, 2014
A rotational capacitive micromachined ultrasonic transducer is introduced. Two pressure-sensitive diaphragms atop vacuum-sealed cavities are mechanically coupled via a rocking beam structure. The rocking structure is designed to reduce deflection of the vacuum-sealed diaphragms under atmospheric pressure while introducing ideally zero rotational ...
Michael L. Kuntzman, Neal A. Hall
openaire   +1 more source

Design Analysis of Capacitive Micromachined Ultrasonic Transducers

2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2022
Kendalle Howard, Lucrecia Ramirez, Byoung-Hee You, In-Hyouk Song   +3 more
openaire   +1 more source

Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications

Procedia Engineering, 2014
A 2-D multiple moving membrane capacitive micromachined ultrasonic transducer (M3-CMUT) array has been developed for air-coupled detection purposes in the megahertz frequency range. The transducer includes an array of 6×6 M3-CMUT elements.
Emadi, T.A., Buchanan, D.A.
exaly   +2 more sources

Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications

2007
Piezoelectric crystals, ceramics, polymers, and piezocomposite materials have long dominated the ultrasonic transducer technology, especially in medical ultrasound imaging. In recent years, thanks to the advances in microfabrication techniques, the technology of capacitive Micromachined Ultrasonic Transducers (CMUTs) has emerged as a competitive ...
E Cianci, V Foglietti, A Minotti, A Caronti, G Caliano, M Pappalardo   +5 more
openaire   +5 more sources

Capacitive micromachined ultrasonic transducers: A platform technology

The Journal of the Acoustical Society of America, 2011
Capacitive micromachined ultrasonic transducers (CMUTs) have been under development as alternative transducers for generating and detecting ultrasound. The advent of silicon micromachining enables the realization of the full potential of these transducers and provides performance that makes CMUTs competitive and superior to piezoelectric transducers ...
openaire   +1 more source