Results 171 to 180 of about 324,266 (197)
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Response of capacitive micromachined ultrasonic transducers
SPIE Proceedings, 2008Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for airborne ultrasonic applications, acoustic imaging, and chemical and biological detections. Much attention is also paid how to optimize their performance, so that the accurate simulation of the transmitting response of the CMUTs becomes extremely significant.
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A solution to the charging problems in capacitive micromachined ultrasonic transducers
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process based on the wafer-bonding technique.
Yongli, Huang +4 more
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Design Analysis of Capacitive Micromachined Ultrasonic Transducers
2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2022Kendalle Howard +3 more
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Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts
Ultrasonics, 2008In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage.
Yongli, Huang +5 more
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Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate the dispersion in the frequency spectrum of adjacent ...
Caronti A. +7 more
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Rotational Capacitive Micromachined Ultrasonic Transducers (cMUTs)
Journal of Microelectromechanical Systems, 2014A rotational capacitive micromachined ultrasonic transducer is introduced. Two pressure-sensitive diaphragms atop vacuum-sealed cavities are mechanically coupled via a rocking beam structure. The rocking structure is designed to reduce deflection of the vacuum-sealed diaphragms under atmospheric pressure while introducing ideally zero rotational ...
Michael L. Kuntzman, Neal A. Hall
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Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
2007Piezoelectric crystals, ceramics, polymers, and piezocomposite materials have long dominated the ultrasonic transducer technology, especially in medical ultrasound imaging. In recent years, thanks to the advances in microfabrication techniques, the technology of capacitive Micromachined Ultrasonic Transducers (CMUTs) has emerged as a competitive ...
E Cianci +5 more
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Capacitive micromachined ultrasonic transducers: A platform technology
The Journal of the Acoustical Society of America, 2011Capacitive micromachined ultrasonic transducers (CMUTs) have been under development as alternative transducers for generating and detecting ultrasound. The advent of silicon micromachining enables the realization of the full potential of these transducers and provides performance that makes CMUTs competitive and superior to piezoelectric transducers ...
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