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Capacitive micromachined ultrasonic transducers with novel membrane design
Procedia Chemistry, 2009Toshiyuki Tsuchiya +2 more
exaly
Capacitive micromachined ultrasonic transducer and method of manufacturing the same
2020GROSS DOMINIQUE +2 more
openaire +3 more sources
An ethanol concentration detection method based on capacitive micromachined ultrasonic transducer
Sensors and Actuators B: ChemicalZhaodong Li, Yuhua Yang
exaly

