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A Capacitive MEMS Pressure Sensor With Wavy Membrane and Linear Capacitance-Pressure Response
Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, 2019Abstract A novel structure for capacitive MEMS pressure sensors is presented that can be used for a wide range of pressure sensing applications. The sensor is designed such that its characteristic capacitance-pressure (C-P) response is highly linear and could cover a wide range of working pressure.
Stephen Oke, Mohammad Shavezipur
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Electronic circuits for capacitive pressure sensors
Images of the Twenty-First Century. Proceedings of the Annual International Engineering in Medicine and Biology Society, 2003Three different electronic circuits for characterizing the commercially available Orthoflex Hercules capacitive pressure sensors over the pressure range of 0-2 MPa are discussed. A portable microprocessor-based system is used to measure the pressure between the foot and the shoe.
A. Patel +3 more
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An integrated miniature capacitive pressure sensor
Sensors and Actuators A: Physical, 1991Abstract A newly designed capacitive pressure sensor which incorporates a CMOS IC on the same silicon chip has been developed. The sensor chip is 3.3 mm × 3.7 mm × 0.5 mm in size, and both the sensing capacitive element and the electronic circuit are hermetically sealed between the silicon substrate and the glass cover using a unique electrical ...
Takeshi Kudoh +2 more
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Analysis, Design, and Performance of a Capacitive Pressure Sensor IC
IEEE Transactions on Biomedical Engineering, 1986Medkcal research has an urgent nieed for a small, accurate, stable, low-power, biocomnpatible, and inexpensive pressure sensor with a zero to full-scale range of 0-300 mmHg. A comparison of fundamenital transducer limits shows that the capacitive device offers better accuracy than the piezoresistive type.
M J, Smith, L, Bowman, J D, Meindl
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Transparent, Flexible, Conformal Capacitive Pressure Sensors with Nanoparticles
Small, 2018AbstractThe fundamental challenge in designing transparent pressure sensors is the ideal combination of high optical transparency and high pressure sensitivity. Satisfying these competing demands is commonly achieved by a compromise between the transparency and usage of a patterned dielectric surface, which increases pressure sensitivity, but decreases
Hyeohn Kim +10 more
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Design of a graphene capacitive pressure sensor for ultra-low pressure detection
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2016This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range.
Yangxi Zhang +4 more
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Symmetric differential capacitive pressure sensor
Review of Scientific Instruments, 1993Differential capacitive sensors are common to pressure gauges. Previous sensors of the bridge type have utilized only two variable (active) components, resulting in a half-bridge electrical equivalent circuit. There are numerous advantages of a symmetric full bridge, using four active components.
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A fully integrated capacitance boosting offset calibration circuit for capacitive pressure sensor
2016 International Symposium on Integrated Circuits (ISIC), 2016A novel fully integrated capacitance boosting offset calibration circuit (OCC) for capacitive pressure sensor is presented. With the miniaturization of pressure sensor dimensions, the sensor sensitivity is reduced accordingly to sub-fF/mmHg range. Therefore the analog-frontend (AFE) in the sensor readout circuit has to provide very high gain to meet ...
Leo John Chemmanda +2 more
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Flexible Mesostructured Capacitive Pressure Sensor for Blood Pressure Monitoring
2023 IEEE SENSORS, 2023Shubham Kumar, Sanjay Yadav, Ashok Kumar
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Development of Capacitive Pressure Sensor for Automotives
SAE Technical Paper Series<div class="section abstract"><div class="htmlview paragraph">Measurement plays a crucial role in the precise and accurate management of automotive subsystems to enhance efficiency and performance. Sensors are essential for achieving high levels of accuracy and precision in control applications. Rapid technical advancements have transformed
Geetha P +5 more
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