Results 251 to 260 of about 191,419 (298)
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Copper Etching: New Chemical Approaches
MRS Bulletin, 1993 There is a tremendous demand for improved performance and speed in consumer electronics that is likely to continue as new applications and developments occur. This demand necessitates a reduction in the critical dimensions and an increase in the density of devices in microelectronic circuits.Mark J. Hampden-Smith, Toivo T. Kodasopenaire +1 more sourceLaser - Assisted Chemical Etching
SPIE Proceedings, 1984 Laser-induced or -enhanced chemical etching of solid surfaces has provided an important new tool in recent years for materials processing. Studies have been reported on a wide range of substrates, including semiconductors, metals, ceramics, glasses and thin organic films. In this paper the current status of the field is reviewed.openaire +1 more sourceChemical Etching
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourceChemical Dry Etching
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourcePhysical-Chemical Etching
2012 Patrick M. Winter, Gregory M. Lanza, Samuel A. Wickline, Marc Madou, Chunlei Wang, Parag B. Deotare, Marko Loncar, Yoke Khin Yap, Jérôme Rose, Mélanie Auffan, Olivier Proux, Vincent Niviere, Jean-Yves Bottero, Zhong Lin Wang, Ying Liu, R. G. Polcawich, J. S. Pulskamp, R. M. Proie, Woo-Tae Park, Sergei V. Kalinin, Brian J. Rodriguez, Andrei L. Kholkin, Gang Logan Liu, Jao Lagemaat, Lorenzo Valdevit, John W. Hutchinson, Seajin Oh, Marc Madou, Katja Tonisch, Enrica De Rosa, Joseph Fernandez-Moure, Ennio Tasciotti, Denis Gebauer, Brian E. O’Neill, King C. Li +34 moreopenaire +1 more source
