Silicon Conical Structures by Metal Assisted Chemical Etching [PDF]
Micromachines, 2020 A simple and inexpensive method to obtain Si conical structures is proposed. The method consists of a sequence of steps that include photolithography and metal assisted chemical etching (MACE) to create porous regions that are dissolved in a post-etching
Oscar Pérez-Díaz +1 more
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Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review [PDF]
Nanomaterials, 2021 Silicon is the undisputed leader for microelectronics among all the industrial materials and Si nanostructures flourish as natural candidates for tomorrow’s technologies due to the rising of novel physical properties at the nanoscale.
Antonio Alessio Leonardi +2 more
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Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures [PDF]
Nanomaterials, 2021 High-aspect ratio silicon (Si) nanostructures are important for many applications. Metal-assisted chemical etching (MACE) is a wet-chemical method used for the fabrication of nanostructured Si.
Rabia Akan, Ulrich Vogt
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Deep Etching of Silicon Based on Metal-Assisted Chemical Etching. [PDF]
ACS Omega, 2022 A deep etching method for silicon "micro"structures was successfully developed. This wet etching process is based on metal-assisted chemical etching (MACE), which was previously mainly utilized to etch the features that have lateral dimensions of "nanometers." In this novel MACE, the critical improvement was to promote the "out-of-plane" mass transfer ...
Nur'aini A, Oh I.
europepmc +3 more sources
Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching [PDF]
Micromachines, 2022 We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately.
Lansheng Zhang +4 more
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Metal-Assisted Chemical Etching for Anisotropic Deep Trenching of GaN Array [PDF]
Nanomaterials, 2021 Realizing the anisotropic deep trenching of GaN without surface damage is essential for the fabrication of GaN-based devices. However, traditional dry etching technologies introduce irreversible damage to GaN and degrade the performance of the device. In
Qi Wang +7 more
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Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review [PDF]
Micromachines, 2020 High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X ...
Lucia Romano, Marco Stampanoni
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Reduction of Nitroaromatics by Gold Nanoparticles on Porous Silicon Fabricated Using Metal-Assisted Chemical Etching [PDF]
Nanomaterials, 2023 In this study, we investigated the use of porous silicon (PSi) fabricated using metal-assisted chemical etching (MACE) as a substrate for the deposition of Au nanoparticles (NPs) for the reduction of nitroaromatic compounds.
Ling-Yi Liang +3 more
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Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching [PDF]
Micromachines, 2020 Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to ...
Tae Kyoung Kim +6 more
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Nanotexturing of Silicon by Metal-Assisted Chemical Etching
Фізика і хімія твердого тіла, 2016 This paper describes the method of metal assisted chemical etching (MacEtch) as an efficient approach for structuring the silicon surface with the ability to manage effectively the geometric parameters of the structures and their distribution on the ...
Ye. I. Berezhanskyi +3 more
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