Sacrificial layer process with laser-driven release for batch assembly operations [PDF]
, 1998 Published ...
Holmes, AS, Saidam, SM
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Nanostructured Silicon as Potential Anode Material for Li-Ion Batteries
Molecules, 2020 Commercial micrometer silicon (Si) powder was investigated as a potential anode material for lithium ion (Li-ion) batteries. The characterization of this powder showed the mean particle size of approx.75.2 nm, BET surface area of 10.6 m2/g and average ...
Matea Raić +6 more
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Etching rate of silicon nanowires with highly doped silicon during metal-assisted chemical etching
Materials Research Express, 2022 The fabrication of silicon nanowires (SiNWs) by metal-assisted chemical etching (MACE) has been widely studied in a variety of fields. SiNWs by high-doped silicon are potential materials to be applied in thermoelectric, lithium-ion batteries and sensors.
Haibin Li, Shinya Kato, Tetsuo Soga
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Development of additive-assisted Ag-MACE for multicrystalline black Si solar cells
Electrochemistry Communications, 2020 The uniform distribution of silver nanoparticles on the surfaces of diamond-wire sawn multicrystalline silicon (mc-Si) is critical for the texturing of mc-Si by the Ag metal-assisted chemical etching method (Ag-MACE).
Xinpu Li +9 more
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Gold surface with gold nitride–a surface enhanced Raman scattering active substrate [PDF]
, 2009 The nitration of gold surfaces is a nonpolluting method, which can lead to large scale production of substrates with remarkable properties and applications. We present a topographical study of the nanoscale structure of the gold nitride surfaces produced
Alves, Luis +3 more
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Porous Silicon Formation by Metal-Assisted Chemical Etching
Acta Physica Polonica A, 2009 The method of metal-assisted chemical etching produces a porous silicon layer. Palladium particles are deposited on both: multi-crystalline and Czochralski grown mono-crystalline Si wafers by immersing them in PdCl2 solution for 1 to 3 min. X-ray photoelectron spectroscopy analysis of Pd clusters shows a decrease in Pd metal fraction by prolonged ...
M. Lipinski +3 more
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FORMATION OF ANTIREFLECTIVE SILICON SURFACES BY ELECTROCHEMICAL AND CHEMICAL METHODS
Information and Telecommunication Sciences, 2017 Background. Application of the silicon-based porous textures as an efficient and commercially viable coating has to be maximally adapted to processes of the silicon solar cell manufacturing. To improve the antireflective property of Si frontal surface it
Stepan Nichkalo +2 more
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Role of film conformality in charging damage during plasma-assisted interlevel dielectric deposition [PDF]
, 1999 While observations of charging damage during plasma-assisted deposition have been erratic thus far, concern abounds that it may worsen as aspect ratios increase and high-density plasmas are used more frequently.
Giapis, Konstantinos P. +1 more
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Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures [PDF]
, 2002 This paper presents guidelines for the deep reactive ion etching (DRIE) of silicon MEMS structures, employing SF/sub 6//O/sub 2/-based high-density plasmas at cryogenic temperatures.
Boer, Meint J. de +6 more
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White paper on the future of plasma science and technology in plastics and textiles [PDF]
, 2019 This is the peer reviewed version of the following article: “Uros, C., Walsh, J., Cernák, M., Labay, C., Canal, J.M., Canal, C. (2019) White paper on the future of plasma science and technology in plastics and textiles.
Canal Arias, José María +5 more
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