Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching [PDF]
Micromachines, 2020 Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to ...
Tae Kyoung Kim +6 more
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Nano ExpressMetal-assisted chemical etching of silicon, especially in the vapour phase, is a highly promising technique for fabricating nanostructures with high aspect ratios.
Hanna Ohlin +3 more
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Porous silicon produced by metal assisted chemical etching as an antimicrobial strategy
Discover MaterialsThe escalating global crisis of antimicrobial resistance (AMR) requires a deeper fundamental understanding of bactericidal strategies that operate independently of biochemical pathways.
Estíbaliz M. Ramírez +3 more
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Фізика і хімія твердого тілаSilicon nanowires are valuable for their compatibility with silicon technology and unique properties. Using metal-assisted chemical etching, we produced silicon nanowires and studied the effects of clustering, roughness, and length on wetting ...
I.I. Skrypnyk +2 more
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Interlayer-Catalyst Method for Metal-Assisted Chemical Etching of Ultra-High Aspect Ratio Silicon Nanostructures. [PDF]
Small MethodsBenz BPJ, Stampanoni M, Romano L.
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Scalable Fabrication of 4 nm Silicon Nanopores by Self-Limiting Metal-Assisted Chemical Etching Combined with Optical Process Control. [PDF]
LangmuirDe Ferrari F +6 more
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Nanostructuring of Si substrates by a metal-assisted chemical etching and dewetting process. [PDF]
RSC Adv, 2018 In this work, we reported on the development of lithography-free technology for the fabrication of nanopatterned Si substrates.
Stafiniak A +3 more
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Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching [PDF]
Nanoscale Research Letters, 2017 Many potential applications of porous silicon nanowires (SiNWs) fabricated with metal-assisted chemical etching are highly dependent on the precise control of morphology for device optimization. However, the effects of key etching parameters, such as the
Lester U. Vinzons +5 more
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High‐Precision Silicon Microgrooves via Metal‐Assisted Chemical Etching (MACE) Using Electrospun Nanofibers [PDF]
Advanced Materials InterfacesSilicon nano/microstructures have attracted significant interest for their applications in electronics, sensors, and energy devices. However, conventional photolithography‐based fabrication processes face challenges such as high cost, procedural ...
Mun Jeong Choi +3 more
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Metal-assisted chemical etching of silicon and nanotechnology applications
Nano Today, 2014 AbstractSilicon nanostructures exhibit promising application potentials in many fields in comparison with their bulk counterpart or other semiconductor nanostructures. Therefore, the exploiting of controllable fabrication methods of silicon nanostructures, and the exploring of further applications of silicon nanostructures gain extensive attentions. In
Hee Han, Woo Lee
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