Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching [PDF]
Micromachines, 2020 Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to ...
Tae Kyoung Kim +6 more
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Black GaAs by Metal-Assisted Chemical Etching [PDF]
ACS Applied Materials & Interfaces, 2018 Large area surface microstructuring is commonly employed to suppress light reflection and enhance light absorption in silicon photovoltaic devices, photodetectors, and image sensors. To date, however, there are no simple means to control the surface roughness of III-V semiconductors by chemical processes similar to the metal-assisted chemical etching ...
Franco Cacialli +2 more
exaly +5 more sources
Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching [PDF]
Nanoscale Research Letters, 2017 Many potential applications of porous silicon nanowires (SiNWs) fabricated with metal-assisted chemical etching are highly dependent on the precise control of morphology for device optimization. However, the effects of key etching parameters, such as the
Lester U. Vinzons +5 more
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Metal-assisted chemical etching of silicon and nanotechnology applications
Nano Today, 2014 AbstractSilicon nanostructures exhibit promising application potentials in many fields in comparison with their bulk counterpart or other semiconductor nanostructures. Therefore, the exploiting of controllable fabrication methods of silicon nanostructures, and the exploring of further applications of silicon nanostructures gain extensive attentions. In
Hee Han, Woo Lee
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Nanostructuring of Si substrates by a metal-assisted chemical etching and dewetting process. [PDF]
RSC Adv, 2018 In this work, we reported on the development of lithography-free technology for the fabrication of nanopatterned Si substrates.
Stafiniak A +3 more
europepmc +4 more sources
Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching [PDF]
Nanoscale Research Letters, 2017 GaAs nanopillar arrays were successfully fabricated by metal-assisted chemical etching using Au nanodot arrays. The nanodot arrays were formed on substrates by vacuum deposition through a porous alumina mask with an ordered array of openings. By using an
Hidetaka Asoh +2 more
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Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon
ACS Applied Materials & Interfaces, 2016 Metal-assisted chemical etching (MACE) is a versatile anisotropic etch for silicon although its mechanism is not well understood. Here we propose that the Schottky junction formed between metal and silicon plays an essential role on the distribution of holes in silicon injected from hydrogen peroxide.
Yi Cui +2 more
exaly +4 more sources
Comparing metal assisted chemical etching of N and P-type silicon nanostructures
Micro and Nano Engineering, 2023 Metal assisted chemical etching is a promising method for fabricating high aspect ratio micro- and nanostructures in silicon. Previous results have suggested that P-type and N-type silicon etches with different degrees of anisotropy, questioning the use ...
Hanna Ohlin +3 more
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Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching [PDF]
Технологія та конструювання в електронній апаратурі, 2013 The author suggests using the etching method MacEtch (metal-assisted chemical etching) for production of micro- and nanostructures of porous silicon. The paper presents research results on the morphology structures obtained at different parameters of ...
I. R. Iatsunskyi
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Engineering high aspect-ratio silicon nanostructures
Physical Sciences and Technology, 2023 Large-area high density vertical silicon nanowire arrays are fabricated by metal-assisted chemical etching. Two-dimensional silica colloidal crystal template or laser interference lithography are used to create gold metal nanohole arrays on a silicon ...
Ali Belarouci +2 more
doaj +1 more source