Results 151 to 160 of about 18,025 (163)
Some of the next articles are maybe not open access.
Chemical mechanical polishing of integrated circuits
1994van Kranenburg, H. +3 more
openaire +2 more sources
Chemical Effect Mechanism in Chemical Mechanical Polishing of Silicon Wafer
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)Xuejie Wang +4 more
openaire +1 more source
Chemical and physical mechanisms of dielectric chemical mechanical polishing (CMP)
2016openaire +1 more source

