Results 151 to 160 of about 18,025 (163)
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Chemical mechanical polishing of integrated circuits

1994
van Kranenburg, H.   +3 more
openaire   +2 more sources

Chemical Effect Mechanism in Chemical Mechanical Polishing of Silicon Wafer

2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
Xuejie Wang   +4 more
openaire   +1 more source

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