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Effects of Etching Parameters on Chemical Etching of Aluminum
2015COŞKUNER, SİBEL, YILDIZ, MELTEM
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CHEMICALLY-ETCHED NANOSTRUCTURES AND RELATED DEVICES
2012KIM SEHEON +3 more
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Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching [PDF]
Micromachines, 2022 We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately.
Lansheng Zhang +4 more
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Deep Etching of Silicon Based on Metal-Assisted Chemical Etching. [PDF]
ACS Omega, 2022 A deep etching method for silicon "micro"structures was successfully developed. This wet etching process is based on metal-assisted chemical etching (MACE), which was previously mainly utilized to etch the features that have lateral dimensions of "nanometers." In this novel MACE, the critical improvement was to promote the "out-of-plane" mass transfer ...
Nur'aini A, Oh I.
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Wet Chemical and Plasma Etching of Photosensitive Glass
Solids, 2023 Photosensitive glasses for radiation-induced 3D microstructuring, due to their optical transparency and thermal, mechanical, and chemical resistance, enable the use of new strategies for numerous microscale applications, ranging from optics to biomedical
Ulrike Brokmann +4 more
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