GaN Stress Evolution During Metal-Organic Chemical Vapor Deposition
The evolution of stress in gallium nitride films on sapphire has been measured in real- time during metal organic chemical vapor deposition. In spite of the 161%0 compressive lattice mismatch of GaN to sapphire, we find that GaN consistently grows in ...
Amano, H.; Chason, E.; Figiel, J.; Floro, J.A.; Han, J.; Hearne, S.; Hunter, J.; Tsong, I.
core
Strain-relaxed, high Ge content, SiGe layers grown on Si (100) substrate by reduced pressure - chemical vapour deposition (RP-CVD) [PDF]
A different approach was taken to relieve strain from a high Germanium (Ge) content, Silicon-Germanium (SiGe) layers on a Silicon (Si) (100) substrate by growing a thin Ge under-layer between substrate and layer.
Alabdulali, Haitham
core
Low‐temperature chemical vapor deposition growth of 2D materials
Two‐dimensional (2D) materials have atomic thickness, and thickness‐dependent electronic transport, optical and thermal properties, highlighting great promise applications in future semiconductor devices.
Minting Lei +11 more
doaj +1 more source
Microstructure of SiOx : H films prepared by plasma enhanced chemical vapor deposition
The micro-Raman spectroscopy and infrared (IR) spectroscopy have been performed for the study of the microstructure of amorphous hydrogenated oxidized silicon (alpha-SiOx,:H) films prepared by Plasma Enhanced Chemical Vapor Deposition technique.
Kong GL +4 more
core
Hydrogenated microcrystalline silicon (mu c-Si:H) thin films were prepared by high-pressure radio-frequency (13.56 MHz) plasma enhanced chemical vapor deposition (rf-PECVD) with a screened plasma.
Zhou, YQ +7 more
core
Chemical vapor deposition growth and characterization of ReSe<sub>2</sub>. [PDF]
Onasanya J +5 more
europepmc +1 more source
Computational Modeling and Experimental Validation of Variabilities in Chemical Vapor Deposition of Graphene on Metals. [PDF]
Joshi T, Raman RKS, Ventikos Y.
europepmc +1 more source
Flexible Polypyrrole-Based pH Sensors via Oxidative Chemical Vapor Deposition. [PDF]
Mukherjee A +15 more
europepmc +1 more source
A Tandem Chemical Vapor Deposition Platform for the Solvent-Free Synthesis of Polypeptide Architectures. [PDF]
Kratzer D +4 more
europepmc +1 more source
Undoped hydrogenated microcrystalline silicon (mu c-Si:H) thin films were prepared at low temperature by hot wire chemical vapor deposition (HWCVD). Microstructures of the mu c-Si:H films with different H-2/SiH4 ratios and deposition pressures have been ...
Zhu M +6 more
core

