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Immersion liquids for lithography in the deep ultraviolet
SPIE Proceedings, 2003The requirements of liquids for use in immersion lithography are discussed. We present simple calculations of the transmission and index homogeneity requirements of the immersion liquid (T > 0.95 and δn < 5×10-7 respectively for sin θ = NA/n = 0.9 and a working distance of 1 mm) along with the temperature and pressure control requirements which follow ...
Michael Switkes +6 more
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Far-Ultraviolet Spectroscopy and Deep-Ultraviolet Spectroscopy: Industrial Applications
2015FUV or DUV absorption spectrum has very strong absorptivity with a steep absorption edge. Since the spectral changes in the intensity, position, and bandwidth of the band are observed sensitively even at the portion of the tail band, these spectra can be applied for a powerful method in industrial analytical applications.
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Deep-Ultraviolet Microscopy and Microspectroscopy
2015Microscopy and microspectroscopy are popular techniques for chemical analysis of a specimen having a micron to submicron distribution of material or material properties, such as living cells, drug agents, microelectronic devices, and nanocarbon materials. Deep-ultraviolet (DUV) light has several advantages compared to visible or infrared (IR) light for
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Recent progress in ultraviolet and deep-ultraviolet nonlinear optical aluminoborates
Chinese Journal of Structural Chemistry, 2023Qing-Fen Li +3 more
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Fibre sources in the deep ultraviolet
Nature Photonics, 2011Zhipei Sun, Andrea C. Ferrari
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Deep‐Ultraviolet Biomolecular Imaging and Analysis
Advanced Optical Materials, 2019Yasuaki Kumamoto, Satoshi Kawata
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