Results 31 to 40 of about 15,333 (266)
Mitigating the Impact of Asymmetric Deformation on Advanced Metrology for Photolithography
Controlling overlay in lithography is crucial for improving the yield of integrated circuit manufacturing. The process disturbances can cause undesirable morphology changes of overlay targets (such as asymmetric grating), which can significantly impact ...
Wenhe Yang +3 more
doaj +1 more source
Phase Imbalance Optimization in Interference Linear Displacement Sensor with Surface Gratings
In interferential linear displacement sensors, accurate information about the position of the reading head is calculated out of a pair of quadrature (sine and cosine) signals.
Sergey Odinokov +4 more
doaj +1 more source
Titanium Suboxides Responsible for Electronic Anomaly Near Room Temperature in the Ti3C2Tx MXene
Our multi‐technique study reveals that the near‐room‐temperature anomaly in Ti3C2Tx MXene is linked to titanium suboxide nanodomains, including Ti3O5, embedded within the MXene host. Their temperature‐driven transformation provides an alternative explanation to solvent‐ and swelling‐based models and offers new insight into the thermally activated ...
Bence G. Márkus +8 more
wiley +1 more source
The possibility of surface wave generation by diffraction of pressure waves on deeply corrugated one-dimensional phononic crystal gratings is studied both theoretically and experimentally.
Rayisa P. Moiseyenko +4 more
doaj +1 more source
Optical Signature of Moiré Superlattices Formed by Twisted SrTiO3 Membranes
We discover optical signatures from bonded interfaces in twisted SrTiO3 moiré superlattices, including low‐frequency Raman vibrational modes and strong second‐harmonic generation, consistent with strong interlayer coupling inferred from cross‐sectional electron microscopy and ab initio calculations. ABSTRACT Moiré superlattices formed at the interfaces
T. A. M. Ragib Shahriar +13 more
wiley +1 more source
Surface-plasmon-enhanced strain-wave-induced optical diffraction changes from a segmented grating
We report on surface-plasmon-polariton-enhanced (SPP-enhanced), strain-wave-induced reflection and diffraction changes on a Au-covered, segmented grating.
Thomas J. van den Hooven +1 more
doaj +1 more source
Photoaligned and photopatterned liquid crystal platforms provide programmable control of optical phase, polarization, and spin‐orbit interactions, enabling compact generation of structured light and complex wavefronts. This review highlights how tailored molecular orientations transform simple beams into designed optical fields, opening versatile ...
Le Zhou +6 more
wiley +1 more source
A Study on Length Traceability and Diffraction Efficiency of Chromium Gratings
Measurement traceability is a prerequisite for achieving accurate and reliable results as well as technical standardization. The period of Chromium (Cr) gratings fabricated by atomic lithography can be directly traced back to natural constants.
Lihua Lei +8 more
doaj +1 more source
Sea cucumber mutable collagenous tissue (MCT) is a remarkable collagen‐based material which can rapidly undergo large changes in stiffness through transiently bound effector proteins. Here, we investigate the hierarchical structure and mechanical response of MCT from Cucumaria frondosa across length scales with a wide range of methods, also exploring ...
Nathalie R. H. Singh +7 more
wiley +1 more source
In this work, diamonds with negative charged silicon‐vacancy (SiV−) centers have been designed for use as thermometers in biomedical applications. Multiparametric analysis of the emission characteristics of the SiV− centers provides extraordinary sensitivity for temperature detection in the physiological temperature range.
María Gragera +6 more
wiley +1 more source

