Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor [PDF]
Micromachines, 2022 This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses.
Xiaopeng Sun +5 more
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Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope [PDF]
Sensors, 2023 In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes ...
Shihe Wang +3 more
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Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator [PDF]
Micromachines, 2018 Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is ...
Xin Zhou +10 more
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The Radial Electric Field Excited Circular Disk Piezoceramic Acoustic Resonator and Its Properties
Sensors, 2021 A new type of piezoceramic acoustic resonator in the form of a circular disk with a radial exciting electric field is presented. The advantage of this type of resonator is the localization of the electrodes at one end of the disk, which leaves the second
Andrey Teplykh +3 more
doaj +4 more sources
Energy Loss in a MEMS Disk Resonator Gyroscope [PDF]
Micromachines, 2019 Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping ...
Jianbing Xie, Yongcun Hao, Weizheng Yuan
doaj +5 more sources
Dynamic Modeling of the Multiring Disk Resonator Gyroscope [PDF]
Micromachines, 2019 The multiring disk resonator gyroscope (DRG) has been a candidate for high performance gyroscopes, however nowadays the finite element method (FEM) is the main method for its analysis due to its complex structure. In this paper we propose a new method to
Qingsong Li +6 more
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Research on Energy Dissipation Mechanism of Cobweb-like Disk Resonator Gyroscope [PDF]
MicromachinesThe micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within
Huang Yi +4 more
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A Low-Noise Interface ASIC for MEMS Disk Resonator Gyroscope [PDF]
Micromachines, 2023 This paper proposes a low-noise interface application-specific integrated circuit (ASIC) for a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) which operates in force-to-rebalance (FTR) mode.
Wenbo Zhang +7 more
doaj +2 more sources
First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope [PDF]
Sensors, 2020 In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis.
Hao Wang, Xiupu Wang, Jianbing Xie
doaj +2 more sources
Crossed ring anchored disk resonator for self-alignment of the anchor [PDF]
Journal of Advanced Research, 2014 Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q).
Masoud Baghelani +2 more
doaj +2 more sources