Results 151 to 160 of about 1,014,878 (298)
Recent Advances in Plasma‐Enhanced Atomic Layer Etching for Next‐Generation Nanofabrication
Continued semiconductor miniaturization demands atomic‐scale patterning and ultralow surface roughness beyond the capabilities of conventional reactive ion etching. This review highlights advances in isotropic and anisotropic plasma‐enhanced atomic layer etching since 2020, covering fundamental mechanisms, applications across major semiconductor ...
Shih‐Nan Hsiao
wiley +1 more source
Macropore‐infused nanocomposite emulsion thermosets (MINETs) offer tunable multifunctionality due to their incorporation of structural resin, functional nanoparticles, and working fluid stabilized by surfactant. Here we show that if ionic liquid working fluids are introduced, structural capacitive (conductive particles) or separator (insulating ...
Bryan Llumiquinga +6 more
wiley +1 more source
A dual characterization strategy combining nanomechanical and mass measurements resolves a common operational loading threshold in reverse micelle nanoreactors. This transferable framework provides a rational strategy for optimizing precursor loading and nanoparticle synthesis, across template‐mediated fabrication systems.
Linan Cui +3 more
wiley +1 more source
Feature Comparison and Process Optimization of Multiple Dry Etching Techniques Applied in Inner Spacer Cavity Formation of GAA NSFET. [PDF]
Wang M +5 more
europepmc +1 more source
The relationship between the Young's modulus and dry etching rate of polydimethylsiloxane (PDMS). [PDF]
Fitzgerald ML +5 more
europepmc +1 more source
The PTL–CL interface plays a decisive role in PEMWE performance by governing electron conduction, water supply, oxygen removal, catalyst utilization, and interfacial stability. This review summarizes interface‐related resistance sources, characterization methods, and engineering strategies, highlighting rational PTL–CL interface design for low‐cost ...
Aobo Wan, Zhengkai Tu
wiley +1 more source
This review discusses recent progress in metal complex‐based, non‐enzymatic electrochemical sensors for cholesterol detection. We examine metal oxides, metal sulfides, and hybrid nanomaterials, highlighting their catalytic mechanisms and material design strategies.
Longfei (Jack) Yin +6 more
wiley +1 more source
One-Step Dry-Etching Fabrication of Tunable Two-Hierarchical Nanostructures. [PDF]
Ji X +6 more
europepmc +1 more source
A mask‐free and cost‐effective UV‐pico‐second laser‐based microfabrication method is proposed to fabricate large‐area biodegradable microelectrode arrays and pressure sensors. These devices demonstrate low impedance, good conformability, excellent biocompatibility, and rapid degradation, providing a new route for next‐generation transient electronics ...
Bhavani Prasad Yalagala +5 more
wiley +1 more source
Dry Etching Characteristics of InGaZnO Thin Films Under Inductively Coupled Plasma-Reactive-Ion Etching with Hydrochloride and Argon Gas Mixture. [PDF]
Oh C +6 more
europepmc +1 more source

