Dicing of composite substrate for thin film AlGaInP power LEDs by wet etching [PDF]
Scientific Reports, 2021 In this paper, thin film AlGaInP LED chips with a 50 μm thick composite metal substrate (Copper-Invar-Copper; CIC) were obtained by the wet etching process. The pattern of the substrate was done by the backside of the AlGaInP LED/CIC.
Ray-Hua Horng +4 more
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Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process [PDF]
MicromachinesPreparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
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Fabrication of wafer-scale nanoporous AlGaN-based deep ultraviolet distributed Bragg reflectors via one-step selective wet etching [PDF]
Scientific Reports, 2022 In this paper, we reported on wafer-scale nanoporous (NP) AlGaN-based deep ultraviolet (DUV) distributed Bragg reflectors (DBRs) with 95% reflectivity at 280 nm, using epitaxial periodically stacked n-Al0.62Ga0.38N/u-Al0.62Ga0.38N structures grown on AlN/
Yongming Zhao +8 more
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Wet Chemical and Plasma Etching of Photosensitive Glass [PDF]
Solids, 2023 Photosensitive glasses for radiation-induced 3D microstructuring, due to their optical transparency and thermal, mechanical, and chemical resistance, enable the use of new strategies for numerous microscale applications, ranging from optics to biomedical
Ulrike Brokmann +4 more
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Research on Wet Etching Techniques for GaInAs/AlInAs/InP Superlattices in Quantum Cascade Laser Fabrication [PDF]
NanomaterialsWet etching is the mainstream fabrication method for single-bar quantum cascade lasers (QCLs). Different etching solutions result in varying etching effects on III-V semiconductor materials.
Shiya Zhang +6 more
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Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices [PDF]
Microsystems & NanoengineeringGlass is one of the most widely used functional materials in various fields, thus developing high-precision, on-demand and low-cost glass microstructuring technologies is essential for both academic and industry.
Jiajia Yu +9 more
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Anisotropy in the wet-etching of semiconductors
Current Opinion in Solid State and Materials Science, 2005 The surface chemistry and electrochemistry of the anisotropic etching of semiconductors are reviewed. Recent insights into the anisotropic chemical etching of silicon in alkaline solution and of electrochemical etching of anisotropic pores in n-type semiconductors are described.
Harold Philipsen
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Advanced Etching Techniques of LiNbO3 Nanodevices
Nanomaterials, 2023 Single LiNbO3 (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant ...
Bowen Shen +7 more
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A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers [PDF]
Sensors and Actuators A: Physical, 2019 Haoran Wang, Huikai Xie
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InGaN Laser Diodes with Etched Facets for Photonic Integrated Circuit Applications
Micromachines, 2023 The main objective of this work is to demonstrate and validate the feasibility of fabricating (Al, In) GaN laser diodes with etched facets. The facets are fabricated using a two-step dry and wet etching process: inductively coupled plasma—reactive ion ...
Krzysztof Gibasiewicz +6 more
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