Results 1 to 10 of about 16,951 (156)

Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging [PDF]

Micromachines
Through-glass vias (TGVs) are important high-aspect-ratio structures for glass-based advanced integration, and their wet-etching morphology significantly influences metallization quality, electrical performance, and reliability. This review establishes a
Qi Zhang, Houtong Liu
doaj   +2 more sources

Formation of near-vertical trenches and fins with flat {−201} sidewalls on (512) β-Ga2O3 via TMAH wet etching [PDF]

Science and Technology of Advanced Materials
We achieved the formation of near-vertical trenches and fins with exceptionally flat {−201}-faceted sidewalls on (512) β-Ga2O3 substrates by crystallographic wet etching in 25-wt% tetramethylammonium hydroxide (TMAH).
Takayoshi Oshima
doaj   +2 more sources

Dicing of composite substrate for thin film AlGaInP power LEDs by wet etching [PDF]

Scientific Reports, 2021
In this paper, thin film AlGaInP LED chips with a 50 μm thick composite metal substrate (Copper-Invar-Copper; CIC) were obtained by the wet etching process. The pattern of the substrate was done by the backside of the AlGaInP LED/CIC.
Ray-Hua Horng, Shreekant Sinha, Fu-Gow Tarntair, Hsiang-An Feng, Chia-Wei Tu   +4 more
doaj   +2 more sources

Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process [PDF]

Micromachines
Preparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
doaj   +2 more sources

Fabrication of wafer-scale nanoporous AlGaN-based deep ultraviolet distributed Bragg reflectors via one-step selective wet etching [PDF]

Scientific Reports, 2022
In this paper, we reported on wafer-scale nanoporous (NP) AlGaN-based deep ultraviolet (DUV) distributed Bragg reflectors (DBRs) with 95% reflectivity at 280 nm, using epitaxial periodically stacked n-Al0.62Ga0.38N/u-Al0.62Ga0.38N structures grown on AlN/
Yongming Zhao, Maocheng Shan, Zhihua Zheng, Pengcheng Jian, WeiJie Liu, Shizhou Tan, Changqing Chen, Feng Wu, Jiangnan Dai   +8 more
doaj   +2 more sources

Research on Wet Etching Techniques for GaInAs/AlInAs/InP Superlattices in Quantum Cascade Laser Fabrication [PDF]

Nanomaterials
Wet etching is the mainstream fabrication method for single-bar quantum cascade lasers (QCLs). Different etching solutions result in varying etching effects on III-V semiconductor materials.
Shiya Zhang, Lianqing Zhu, Han Jia, Bingfeng Liu, Jintao Cui, Tuo Chen, Mingyu Li   +6 more
doaj   +2 more sources

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices [PDF]

Microsystems & Nanoengineering
Glass is one of the most widely used functional materials in various fields, thus developing high-precision, on-demand and low-cost glass microstructuring technologies is essential for both academic and industry.
Jiajia Yu, Feier Li, Hao Sun, Yike Zhu, Yukun Shi, Renxin Wang, Liqun Du, Yi Li, Mengxi Wu, Junshan Liu   +9 more
doaj   +2 more sources

Anisotropy in the wet-etching of semiconductors

Current Opinion in Solid State and Materials Science, 2005
The surface chemistry and electrochemistry of the anisotropic etching of semiconductors are reviewed. Recent insights into the anisotropic chemical etching of silicon in alkaline solution and of electrochemical etching of anisotropic pores in n-type semiconductors are described.
Harold Philipsen, John J Kelly
exaly   +4 more sources

Mechanistic insights into the acidic wet-chemical silicon etching in HF–HX–X2 solutions, X = Cl, Br, I [PDF]

RSC Advances
Alkaline, wet-chemical silicon etching is an essential part in the manufacturing of silicon solar cells, because the anisotropy of the etching process enables texturization of the wafer surface.
Nils Schubert, Niklas Zomack, André Stapf, Edwin Kroke   +3 more
doaj   +2 more sources

Advanced Etching Techniques of LiNbO₃ Nanodevices

Nanomaterials, 2023
Single LiNbO3 (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant ...
Bowen Shen, Di Hu, Cuihua Dai, Xiaoyang Yu, Xiaojun Tan, Jie Sun, Jun Jiang, Anquan Jiang   +7 more
doaj   +1 more source