Results 11 to 20 of about 490,111 (287)
Gate recess engineering of pseudomorphic In0.30GaAs/GaAs HEMTs [PDF]
, 1996 The authors report how the performance of 0.12 μm GaAs pHEMTs is improved by controlling both the gate recess width, using selective dry etching, and the gate position in the source drain gap, using electron beam lithography.
Taylor, M.R.S. +6 more
core +9 more sources
Transmittance modulation by gold nanoparticle mediated wet chemical etching of silica [PDF]
, 2023 Wet etching in hydrofluoric acid (HF) is one of the most common routes for the surface texturing of silica, leading to improved optical properties, which find applications in several fields.
Neethu, Thomas, Parasuraman, Swaminathan
core +1 more source
Wet Chemical and Plasma Etching of Photosensitive Glass
Solids, 2023 Photosensitive glasses for radiation-induced 3D microstructuring, due to their optical transparency and thermal, mechanical, and chemical resistance, enable the use of new strategies for numerous microscale applications, ranging from optics to biomedical
Ulrike Brokmann +4 more
doaj +1 more source
InGaN Laser Diodes with Etched Facets for Photonic Integrated Circuit Applications
Micromachines, 2023 The main objective of this work is to demonstrate and validate the feasibility of fabricating (Al, In) GaN laser diodes with etched facets. The facets are fabricated using a two-step dry and wet etching process: inductively coupled plasma—reactive ion ...
Krzysztof Gibasiewicz +6 more
doaj +1 more source
Metals, 2022 The effect of a macromolecular additive on the etching rate of aluminum (Al) horizontal etching in the wet process was investigated in this work. The horizontal etching in the Al wet etching process became more evident as the film Al becomes thicker. The
Jingxiu Ding +4 more
doaj +1 more source
A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers [PDF]
Sensors and Actuators A: Physical, 2019 Haoran Wang, Huikai Xie
exaly +2 more sources
Dry etching and sputtering [PDF]
, 2003 Dry etching is an important process for micro- and nanofabrication. Sputtering effects can arise in two contexts within a dry-etch process. Incoming ions cause removal of volatile products that arise from the interaction between the dry-etch plasma and ...
Wilkinson, C.D.W. +3 more
core +2 more sources
Stress analysis, dielectric, piezoelectric, and ferroelectric properties of PZT thick films. Fabrication of a 50MHz Tm-pMUT annular array [PDF]
, 2007 PZT films up to 35 μm thick were fabricated, using a composite sol gel route combining a PZT powder and a PZT sol. The maximum temperature for the process was 710°C.
Dauchy, Florent
core +7 more sources
Micro and Nano Engineering, 2023 Ruthenium (Ru) is a noble metal and is known to be resistant to many common chemicals and mixtures. We report in this study a controlled etching/recessing of Ru via wet processing and a combination of dry and wet process using metal-free chemical ...
Q.T. Le +9 more
doaj +1 more source
Preparation of small silicon carbide quantum dots by wet chemical etching [PDF]
, 2013 Fabrication of nanosized silicon carbide (SiC) crystals is a crucial step in many biomedical applications. Here we report an effective fabrication method of SiC nanocrystals based on simple electroless wet chemical etching of crystalline cubic SiC ...
Szekrényes, Zsolt +5 more
core +1 more source