Results 21 to 30 of about 16,351 (259)

Investigation of a Macromolecular Additive on the Decrease of the Aluminum Horizontal Etching Rate in the Wet Etching Process

Metals, 2022
The effect of a macromolecular additive on the etching rate of aluminum (Al) horizontal etching in the wet process was investigated in this work. The horizontal etching in the Al wet etching process became more evident as the film Al becomes thicker. The
Jingxiu Ding, Ruipeng Zhang, Yuchun Li, David Wei Zhang, Hongliang Lu   +4 more
doaj   +1 more source

Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Micro and Nano Engineering, 2023
Ruthenium (Ru) is a noble metal and is known to be resistant to many common chemicals and mixtures. We report in this study a controlled etching/recessing of Ru via wet processing and a combination of dry and wet process using metal-free chemical ...
Q.T. Le, E. Gül Arslan, J. Rip, H. De Coster, P. Verdonck, D. Radisic, F. Schleicher, I. Vaesen, T. Conard, E. Altamirano-Sanchez   +9 more
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Combined metal-assisted chemical etching and anisotropic wet etching for anti-reflection inverted pyramidal cavities on dendrite-like textured substrates

Results in Physics, 2019
A simple and low-cost method using the combination of metal-assisted chemical etching (MacEtch) and anisotropic wet etching was performed to fabricate anti-reflection inverted pyramidal cavities on dendrite-like textured silicon substrates.
Yu-Keng Lin, Yen-Shin Chen, Chun-Hway Hsueh   +2 more
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Investigation of the Integration of Strained Ge Channel with Si-Based FinFETs

Nanomaterials, 2022
In this manuscript, the integration of a strained Ge channel with Si-based FinFETs was investigated. The main focus was the preparation of high-aspect-ratio (AR) fin structures, appropriate etching topography and the growth of germanium (Ge) as a channel
Buqing Xu, Guilei Wang, Yong Du, Yuanhao Miao, Yuanyuan Wu, Zhenzhen Kong, Jiale Su, Ben Li, Jiahan Yu, Henry H. Radamson   +9 more
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Wet etching of gold on graphene for high-quality resist-free graphene surfaces

Nano Express, 2023
Wet etching of gold on graphene is challenging due to the weak adhesion of the resist mask to graphene. We report an operating procedure for alkali ion-free wet etching of gold on graphene using a mixture of hydrochloric and nitric acids (aqua regia ...
J Kunc, M Shestopalov, J Jo, K Park
doaj   +1 more source

Effect of tetramethylammonium hydroxide/isopropyl alcohol wet etching on geometry and surface roughness of silicon nanowires fabricated by AFM lithography

Beilstein Journal of Nanotechnology, 2016
The optimization of etchant parameters in wet etching plays an important role in the fabrication of semiconductor devices. Wet etching of tetramethylammonium hydroxide (TMAH)/isopropyl alcohol (IPA) on silicon nanowires fabricated by AFM lithography is ...
Siti Noorhaniah Yusoh, Khatijah Aisha Yaacob   +1 more
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Reactive Ion Etching Process of Micro Mechanical Pendulum

MATEC Web of Conferences, 2017
This paper describes the reactive ion etching (RIE) technique of micro mechanical pendulum chip. Micro mechanical pendulum chip processed by the RIE has excellent performances and surface of the chip is smoother than the chip by wet etching.
Zhang Wei, Duan Xiaoyan, Qiao Jin, Yue Ping   +3 more
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Research Review of InAs/GaSb Superlattice Mesa Etching Process [PDF]

Hangkong bingqi
This paper reviews the research on InAs/GaSb superlattice mesa etching technology. The physicochemi-cal mechanism and parameter control of wet and dry etching are analyzed to elucidate the influence of process conditions on mesa morphology, so as to ...
Zhang Xiangyu, Jiang Dongwei, He Wen, Wang Jinzhong
doaj   +1 more source

Using Anisotropic Silicon Etch for Change the Crystal Orientation of Silicon Wafer [PDF]

Engineering and Technology Journal, 2012
In this work، anisotropic silicon etch using KOH ، optical microscopic and X-ray diffraction testing، were used to determine the crystal orientation of the silicon wafer(100) plane , where the mechanical polishing and wet etching described the geometric ...
Saria D.mohammed, Arrej Rlyadh Saeed, Atheer Ibraheem Bbd   +2 more
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Optimization of Sacrificial Layer Etching in Single-Crystal Silicon Nano-Films Transfer Printing for Heterogeneous Integration Application

Nanomaterials, 2021
As one of the important technologies in the field of heterogeneous integration, transfer technology has broad application prospects and unique technical advantages.
Jiaqi Zhang, Yichang Wu, Guofang Yang, Dazheng Chen, Jincheng Zhang, Hailong You, Chunfu Zhang, Yue Hao   +7 more
doaj   +1 more source