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METHOD FOR DRYING AND PRODUCING MICROPOROUS PARTICLES AND A DRYING DEVICE
2000TEICH FRIEDHELM +6 more
openaire +2 more sources
Method and apparatus for dry granulation
2013POLITI GIOVANNI, HEILAKKA ERKKI
openaire +4 more sources
Dry etching agent, dry etching method and method for producing semiconductor device
2018OOMORI HIROYUKI +2 more
openaire +2 more sources

