Focused electron beam induced deposition: A perspective. [PDF]
Beilstein J Nanotechnol, 2012 Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has
Huth M +7 more
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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2018 Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics.
Keller L, Huth M.
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Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material. [PDF]
Micromachines (Basel), 2020 High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Hari S +4 more
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Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2017 The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated.
Spencer JA +8 more
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The rational design of a Au(I) precursor for focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2017 Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique for nanometer-scale chemical synthesis.
Marashdeh A +6 more
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Superconducting nanowires by electron-beam-induced deposition [PDF]
Applied Physics Letters, 2015 Superconducting nanowires can be fabricated by decomposition of an organometallic gas using a focused beam of Ga ions. However, physical damage and unintentional doping often result from the exposure to the ion beam, motivating the search for a means to achieve similar structures with a beam of electrons instead of ions.
Sengupta, Shamashis +6 more
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Evaluation of ion/electron beam induced deposition for electrical connection using a modern focused ion beam system. [PDF]
Appl Microsc, 2019 Focused ion beam method, which has excellent capabilities such as local deposition and selective etching, is widely used for micro-electromechanical system (MEMS)-based in situ transmission electron microscopy (TEM) sample fabrication.
An BS +5 more
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Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition. [PDF]
ACS Omega, 2023 Mason NJ +5 more
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Electron-driven and thermal chemistry during water-assisted purification of platinum nanomaterials generated by electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2018 Focused electron beam induced deposition (FEBID) is a versatile tool for the direct-write fabrication of nanostructures on surfaces. However, FEBID nanostructures are usually highly contaminated by carbon originating from the precursor used in the ...
Warneke Z +4 more
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Cisplatin as a Potential Platinum Focused Electron Beam Induced Deposition Precursor: NH3 Ligands Enhance the Electron-Induced Removal of Chlorine [PDF]
Journal of Physical Chemistry C, 2019 Nanostructures fabricated by focused electron beam induced deposition (FEBID) often have low deposit purities that can be traced back to incomplete precursor decomposition.
Markus Rohdenburg +6 more
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