Results 1 to 10 of about 21,704 (198)
Electrostatic in-plane structural superlubric actuator [PDF]
Nature CommunicationsMicro actuators are widely used in NEMS/MEMS for control and sensing. However, most are designed with suspended beams anchored at fixed points, causing two main issues: restricted actuated stroke and movement modes, and reduced lifespan due to fatigue ...
Xuanyu Huang +6 more
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The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers [PDF]
Microsystems & Nanoengineering, 2022 Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because
Bert Kaiser +10 more
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Fast-Response Electrostatic Actuator Based on Nano-Gap [PDF]
Micromachines, 2017 The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are
Edward Kostsov, Alexei Sokolov
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A V-Shaped Actuator Utilizing Electrostatic Force
Actuators, 2018 In this study, we propose a new ‘V’-shaped actuator with two panels and experimentally and theoretically investigate its actuation to find the most efficient structure. The V-shaped actuator operates like a seesaw.
Kahye Song, Hyeongyu Lee, Youngsu Cha
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Electrostatic curved electrode actuators [PDF]
Journal of Microelectromechanical Systems, 1997 This paper presents the design and performance of an electrostatic actuator consisting of a laterally compliant cantilever beam and a fixed curved electrode, both suspended above a ground plane.
Elwenspoek, Miko +3 more
core +4 more sources
Ultralight soft electrostatic actuators based on solid-liquid-gas architectures [PDF]
Nature CommunicationsSoft actuators enable versatile and adaptable robots capable of operating in unstructured environments and close to humans. Soft electrostatic actuators utilizing electrohydraulic principles are particularly promising, combining all-around actuation ...
Hyeong-Joon Joo +6 more
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A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
Micromachines, 2013 Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in”
Hao Ren +3 more
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Review of Electrohydraulic Actuators Inspired by the HASEL Actuator [PDF]
BiomimeticsThe muscle-like movement and speed of the electrohydraulic actuator have granted it much attention in soft robotics. Our aim is to review the advancements in electrohydraulic actuators inspired by the Hydraulically Amplified Self-healing Electrostatic ...
Levi Tynan +6 more
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Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
Actuators, 2023 Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became ...
Almothana Albukhari, Ulrich Mescheder
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Optimized design and performance testing of hydraulic electrostatic actuator
International Journal of Smart and Nano MaterialsHydraulic electrostatic actuators have become a research hotspot for their inherent flexibility and safety of human-machine interaction. This paper aims to combine the characteristics of dielectric elastomers and fluid actuators, enhancing the dielectric
Yuze Ye +7 more
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