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Active Electrostatic Force Microscopy

2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2015
We present Active Electrostatic Force Microscopy, as a new integrated circuit analysis technique for tracing nets and localizing opens. We demonstrate non-destructive surface and subsurface potential mapping, similar to Electron Beam Absorbed Current microscopy, without the associated high energy electron beam damage to the dielectrics.
Stephen Ippolito   +2 more
openaire   +1 more source

Electrostatic forces in atomic force microscopy

Physical Review B, 2002
In this paper we quantitatively compare various electrostatic models, which describe the interaction of a polarized atomic force microscopy tip with a molecularly smooth and grounded substrate, with a large experimental data set collected at many different tip potentials. The model by Hudlet et al. [Eur. Phys. J.
B. M. Law, F. Rieutord
openaire   +1 more source

Electrostatic force gradient signal: resolution enhancement in electrostatic force microscopy and improved Kelvin probe microscopy

Nanotechnology, 2003
In the present work the electrostatic interaction of a real scanning force microscopy (SFM) probe with a sample is studied theoretically as well as experimentally. To model the probe, a complex system composed of a macroscopic cantilever, a mesoscopic tip cone and a nanometric tip apex is proposed.
A Gil   +3 more
openaire   +1 more source

Quantitative electrostatic force microscopy-phase measurements

Nanotechnology, 2004
The phase mode of electrostatic force microscopy (EFM-phase) is a scanning probe microscopy (SPM) technique used to measure electrostatic force gradient. EFM-phase has a higher resolution than scanning Kelvin probe microscopy (SKPM or SKM), but unlike SKPM it does not yield a direct measurement of local potential. Analytical calculations of tip–surface
Lei, CH   +3 more
openaire   +2 more sources

Electrostatic and contact forces in force microscopy

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991
We have been measuring the electrostatic and contact forces between a tip and a graphite surface in a force microscope, which uses a polarizing optical interferometer. For large distances where the electrostatic force predominates, the data are analyzed in terms of a model which introduces the elongated shape of an actual tip.
Huang Wen Hao, A. M. Baró, J. J. Sáenz
openaire   +1 more source

Reconstruction of electrostatic force microscopy images

Review of Scientific Instruments, 2005
An efficient algorithm to restore the actual surface potential image from Kelvin probe force microscopy measurements of semiconductors is presented. The three-dimensional potential of the tip-sample system is calculated using an integral equation-based boundary element method combined with modeling the semiconductor by an equivalent dipole-layer and ...
E. Strassburg, A. Boag, Y. Rosenwaks
openaire   +1 more source

Multifrequency Atomic Force Microscopy: Compositional Imaging with Electrostatic Force Measurements

Microscopy and Microanalysis, 2011
AbstractWe demonstrate that single-pass Kelvin force microscopy (KFM) and dC/dz measurements in different environments expand the compositional imaging with atomic force microscopy. The KFM and dC/dz studies were performed in the intermittent contact mode with force gradient detection of tip-sample electrostatic interactions. Both factors contribute to
Sergei, Magonov, John, Alexander
openaire   +2 more sources

Quantitative electrostatic force microscopy with sharp silicon tips

Nanotechnology, 2014
Electrostatic force microscopy (EFM) probes are typically coated in either metal (radius ∼ 30 nm) or highly-doped diamond (radius ∼ 100 nm). Highly-doped silicon probes, which offer a sharpened and stable tip apex (radius ∼ 1-10 nm) and are usually used only in standard atomic force microscopy, have been recently shown to allow enhanced lateral ...
Fumagalli, L., Edwards, MA, Gomila, G
openaire   +3 more sources

Electrostatic nanolithography in polymers using atomic force microscopy

Nature Materials, 2003
The past decade has witnessed an explosion of techniques used to pattern polymers on the nano (1-100 nm) and submicrometre (100-1,000 nm) scale, driven by the extensive versatility of polymers for diverse applications, such as molecular electronics, data storage, optoelectronics, displays, sacrificial templates and all forms of sensors.
Sergei F, Lyuksyutov   +7 more
openaire   +2 more sources

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