A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness [PDF]
Sensors, 2015 Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer
Bo Yang +3 more
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A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation [PDF]
Micromachines, 2023 This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the ...
Xiangming Liu +8 more
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Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness [PDF]
Sensors, 2017 Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by ...
Attilio Frangi +2 more
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Monolithic electrostatic actuators with independent stiffness modulation [PDF]
Nature CommunicationsRobotic artificial muscles, inspired by the adaptability of biological muscles, outperform rigid robots in dynamic environments due to their flexibility.
Yuejun Xu +3 more
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A New Hybrid Gyroscope with Electrostatic Negative Stiffness Tuning [PDF]
Sensors, 2013 A variety of gyroscopes have been extensively studied due to their capability of precision detection of rotation rates and extensive applications in navigation, guidance and motion control.
Xian Chu +5 more
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Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness [PDF]
Micromachines, 2018 For the MEMS capacitive accelerometer, parasitic capacitance is a serious problem. Its mismatch will deteriorate the performance of accelerometer. Obtaining the mismatch of the parasitic capacitance precisely is helpful for improving the performance of ...
Xianshan Dong +4 more
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Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces [PDF]
Micromachines, 2021 The bifurcation of the periodic response of a micro-machined gyroscope with cubic supporting stiffness and fractional electrostatic forces is investigated.
Huabiao Zhang, Xinye Li, Lijuan Zhang
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Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer [PDF]
Sensors, 2016 A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM).
Yonggang Yin, Boqian Sun, Fengtian Han
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IEEE AccessThis paper presents an electrostatic layer jamming (ELJ) structure based on the large deflection bending theory (LDTP) of thin plates, which can achieve the characteristic of adjustable stiffness.
Yan Zhang, Yinlong Zhu, Xu Wang
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Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect [PDF]
Sensors, 2016 In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase ...
Yanwei Guan +4 more
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