A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation [PDF]
Micromachines, 2023 This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the ...
Xiangming Liu +8 more
doaj +7 more sources
A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness [PDF]
Sensors, 2015 Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer
Bo Yang +3 more
doaj +8 more sources
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness [PDF]
Sensors, 2017 Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by ...
Attilio Frangi +2 more
doaj +8 more sources
Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness [PDF]
Micromachines, 2018 For the MEMS capacitive accelerometer, parasitic capacitance is a serious problem. Its mismatch will deteriorate the performance of accelerometer. Obtaining the mismatch of the parasitic capacitance precisely is helpful for improving the performance of ...
Xianshan Dong +4 more
doaj +4 more sources
Variable stiffness sandwich panels using electrostatic interlocking core [PDF]
Proceedings of SPIE, 2016 Structural topology has a large impact on the flexural stiffness of a beam structure. Reversible attachment between discrete substructures allows for control of shear stress transfer between structural elements, thus stiffness modulation. Electrostatic adhesion has shown promise for providing a reversible latching mechanism for controllable internal ...
Ian Bond
exaly +5 more sources
Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm [PDF]
Micromachines, 2021 This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one ...
Libin Huang +5 more
doaj +2 more sources
IEEE AccessThis paper presents an electrostatic layer jamming (ELJ) structure based on the large deflection bending theory (LDTP) of thin plates, which can achieve the characteristic of adjustable stiffness.
Yan Zhang, Yinlong Zhu, Xu Wang
doaj +4 more sources
A New Hybrid Gyroscope with Electrostatic Negative Stiffness Tuning [PDF]
Sensors, 2013 A variety of gyroscopes have been extensively studied due to their capability of precision detection of rotation rates and extensive applications in navigation, guidance and motion control.
Xian Chu +5 more
doaj +3 more sources
Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces [PDF]
Micromachines, 2021 The bifurcation of the periodic response of a micro-machined gyroscope with cubic supporting stiffness and fractional electrostatic forces is investigated.
Huabiao Zhang, Xinye Li, Lijuan Zhang
doaj +3 more sources
Monolithic electrostatic actuators with independent stiffness modulation
Nature CommunicationsRobotic artificial muscles, inspired by the adaptability of biological muscles, outperform rigid robots in dynamic environments due to their flexibility.
Yuejun Xu +3 more
doaj +3 more sources