Results 1 to 10 of about 230,348 (126)
Design of a Capacitive MEMS Accelerometer With Softened Beams
Micromachines, 2022 Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer.
Honglong Chang, Yongcun Hao
exaly +4 more sources
High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
Micromachines, 2023 In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being ...
Shuzheng Shi +7 more
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Micro 3D printing of a functional MEMS accelerometer
Microsystems & Nanoengineering, 2022 Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries.
Simone Pagliano +7 more
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Microsystems & Nanoengineering, 2023 The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring.
Chang Ge, Edmond Cretu
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Micromachines, 2021 This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators.
Muhammad Mubasher Saleem +5 more
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A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
Microsystems & NanoengineeringAnti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias force and displacement for achieving stiffness ...
Ruihong Xiong +6 more
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Tilt Sensor with Recalibration Feature Based on MEMS Accelerometer
Sensors, 2022 The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal and long-term drifts, imprecise factory calibration, and aging phenomena.
Sergiusz Łuczak +3 more
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Suitability of MEMS Accelerometers for Condition Monitoring: An Experimental Study
Sensors, 2008 With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen.
Andrew Starr +2 more
exaly +2 more sources
HardwareXVibration-based Condition Monitoring (CM) is an essential tool for identifying potential defects in industrial machinery. However, the implementation of an efficient CM system often necessitates the use of high-cost accelerometers with a large bandwidth.
Morten Opprud Jakobsen
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Sensors, 2021 The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications.
Michał Szermer +9 more
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