Design of a Capacitive MEMS Accelerometer with Softened Beams [PDF]
Micromachines, 2022 Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer.
Honglong Chang, Yongcun Hao
exaly +4 more sources
Tilt Sensor with Recalibration Feature Based on MEMS Accelerometer [PDF]
Sensors, 2022 The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal and long-term drifts, imprecise factory calibration, and aging phenomena.
Maciej Zams, Sergiusz Łuczak
exaly +4 more sources
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer [PDF]
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Meng Zhang, Yan Su, Chaowei Si
exaly +4 more sources
High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones [PDF]
Micromachines, 2023 In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being ...
Shuzheng Shi +7 more
doaj +2 more sources
Design and Fabrication of a Slanted-Beam MEMS Accelerometer [PDF]
Micromachines, 2017 This paper presents a novel capacitive microelectromechanical systems (MEMS) accelerometer with slanted supporting beams and all-silicon sandwich structure.
Bin Tang
exaly +4 more sources
Micro 3D printing of a functional MEMS accelerometer [PDF]
Microsystems & Nanoengineering, 2022 Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries.
Simone Pagliano +7 more
doaj +2 more sources
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach [PDF]
Microsystems & Nanoengineering, 2023 The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring.
Chang Ge, Edmond Cretu
doaj +2 more sources
Electrostatic anti-spring-enhanced MEMS accelerometer with auto-tuning capability [PDF]
Microsystems & NanoengineeringThis study introduces a MEMS accelerometer equipped with an adaptive tuning system for an electrostatic anti-spring. As the input acceleration increases, the sensitivity of the adaptive MEMS accelerometer decreases to compensate for the measurement range.
Chen Wang +10 more
doaj +2 more sources
Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer [PDF]
Micromachines, 2023 This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer.
Fahad A. Mattoo +4 more
doaj +2 more sources
A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators [PDF]
Micromachines, 2021 This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators.
Muhammad Mubasher Saleem +5 more
doaj +2 more sources