Results 21 to 30 of about 141,143 (179)

Research on Decomposition of Offset in MEMS Capacitive Accelerometer

open access: yesMicromachines, 2021
In a MEMS capacitive accelerometer, there is an offset due to mechanical and electrical factors, and the offset would deteriorate the performance of the accelerometer. Reducing the offset from mechanism would benefit the improvement in performance.
Xianshan Dong   +6 more
doaj   +1 more source

MEMS Accelerometers [PDF]

open access: yes, 2019
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality.
Ngo, Ha Duong   +2 more
openaire   +3 more sources

Bayesian Calibration of MEMS Accelerometers

open access: yesIEEE Sensors Journal, 2023
This study aims to investigate the utilization of Bayesian techniques for the calibration of micro-electro-mechanical systems (MEMS) accelerometers. These devices have garnered substantial interest in various practical applications and typically require calibration through error-correcting functions.
Oliver Dürr, Po-Yu Fan, Zong-Xian Yin
openaire   +4 more sources

Online sensor testing through superposition of encoded stimulus. [PDF]

open access: yes, 2007
Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active devices holds great potential.
Bunyan, J.   +9 more
core   +4 more sources

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

open access: yesSensors, 2021
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (
Shayaan Saghir   +5 more
doaj   +1 more source

Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring

open access: yesApplied Sciences, 2016
With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high ...
Chih-Yung Huang, Jian-Hao Chen
doaj   +1 more source

Small Local Earthquake Detection Using Low-Cost MEMS Accelerometers: Examples in Northern and Central Italy

open access: yesThe Seismic Record, 2021
This study evaluates the seismicity detection efficiency of a new low-cost triaxial accelerometer prototype based on microelectromechanical systems (MEMS) technology.
Valeria Cascone   +2 more
doaj   +1 more source

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