Results 21 to 30 of about 141,143 (179)
A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams [PDF]
Alexander Tovstopyat +2 more
exaly +2 more sources
A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost [PDF]
Chaowei Si, Fuhua Yang, Guowei Han
exaly +2 more sources
Calibration Analysis of High-G MEMS Accelerometer Sensor Based on Wavelet and Wavelet Packet Denoising [PDF]
Huiliang Cao, Yunbo Shi, Rui Zhao
exaly +2 more sources
Research on Decomposition of Offset in MEMS Capacitive Accelerometer
In a MEMS capacitive accelerometer, there is an offset due to mechanical and electrical factors, and the offset would deteriorate the performance of the accelerometer. Reducing the offset from mechanism would benefit the improvement in performance.
Xianshan Dong +6 more
doaj +1 more source
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality.
Ngo, Ha Duong +2 more
openaire +3 more sources
Bayesian Calibration of MEMS Accelerometers
This study aims to investigate the utilization of Bayesian techniques for the calibration of micro-electro-mechanical systems (MEMS) accelerometers. These devices have garnered substantial interest in various practical applications and typically require calibration through error-correcting functions.
Oliver Dürr, Po-Yu Fan, Zong-Xian Yin
openaire +4 more sources
Online sensor testing through superposition of encoded stimulus. [PDF]
Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active devices holds great potential.
Bunyan, J. +9 more
core +4 more sources
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (
Shayaan Saghir +5 more
doaj +1 more source
Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring
With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high ...
Chih-Yung Huang, Jian-Hao Chen
doaj +1 more source
This study evaluates the seismicity detection efficiency of a new low-cost triaxial accelerometer prototype based on microelectromechanical systems (MEMS) technology.
Valeria Cascone +2 more
doaj +1 more source

