A STATIC CALIBRATION OF MEMS 3-AXIS ACCELEROMETER USING A GENETIC ALGORITHM [PDF]
Scientific Journal of Silesian University of Technology. Series Transport, 2019 In this paper, a procedure for MEMS accelerometer static calibration using a genetic algorithm, considering non-orthogonality was presented. The results of simulations and real accelerometer calibration are obtained showing high accuracy of parameters ...
Marin MARINOV, Zhivo PETROV
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A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
Micromachines, 2022 This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides.
Chaoxiang Yang +5 more
semanticscholar +1 more source
Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer
Micromachines, 2023 This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer.
Fahad A. Mattoo +4 more
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A Hybrid Algorithm for Noise Suppression of MEMS Accelerometer Based on the Improved VMD and TFPF
Micromachines, 2022 High-G MEMS accelerometer (HGMA) is a new type of sensor; it has been widely used in high precision measurement and control fields. Inevitably, the accelerometer output signal contains random noise caused by the accelerometer itself, the hardware circuit
Yong-Jun Zhou, Hui-Liang Cao, Tao Guo
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Development Of Tilt And Vibration Measurement And Detection System Using MEMS Accelerometer As A Sensor [TK7875. K45 2008 f rb]. [PDF]
, 2008 Dalam projek ini, sistem pengukuran dan pengesan isyarat sudut miring dan isyarat getaran menggunakan meter pecutan MEMS yang mempunyai dua paksi deria X dan Y dibina dengan jayanya. In this project, a measurement and detection system to detect tilt
Abd Wahid, Khairul Anuar
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Japanese Journal of Applied Physics, 2022 This paper describes a highly sensitive microelectromechanical systems (MEMS) accelerometer sensor module to measure micro muscle sounds. Regarding the drift mechanism, we focus on charged particles based on residual water related to MEMS fabrication ...
Akira Onishi +10 more
semanticscholar +1 more source
Modeling and non-linear responses of MEMS capacitive accelerometer
MATEC Web of Conferences, 2014 A theoretical investigation of an electrically actuated beam has been illustrated when the electrostatic-ally actuated micro-cantilever beam is separated from the electrode by a moderately large gap for two distinct types of geometric configurations of ...
Sri Harsha C. +2 more
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A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump
Sensors, 2016 This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a
Yixing Chu +3 more
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An Improved Calibration Technique for MEMS Accelerometer-Based Inclinometers
Sensors, 2020 Micro-electro-mechanical system (MEMS) accelerometer-based inclinometers are widely used to measure deformations of civil structures. To further improve the measurement accuracy, a new calibration technique was proposed in this paper.
Jiaxin Zhu +3 more
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A vibrating beam MEMS accelerometer for gravity and seismic measurements
Scientific Reports, 2020 This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology.
Arif Mustafazade +8 more
semanticscholar +1 more source