Implementation of a CMOS/MEMS Accelerometer with ASIC Processes [PDF]
Micromachines, 2019 This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
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MEMS Accelerometer Noises Analysis Based on Triple Estimation Fractional Order Algorithm [PDF]
Sensors, 2022 This paper is devoted to identifying parameters of fractional order noises with application to noises obtained from MEMS accelerometer. The analysis and parameters estimation will be based on the Triple Estimation algorithm, which can simultaneously ...
Michal Macias +2 more
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An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer [PDF]
Sensors, 2020 Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring.
Xiaoxiao Song +6 more
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An Improved Calibration Technique for MEMS Accelerometer-Based Inclinometers [PDF]
Sensors, 2020 Micro-electro-mechanical system (MEMS) accelerometer-based inclinometers are widely used to measure deformations of civil structures. To further improve the measurement accuracy, a new calibration technique was proposed in this paper.
Jiaxin Zhu +3 more
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Tilt Sensor with Recalibration Feature Based on MEMS Accelerometer [PDF]
Sensors, 2022 The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal and long-term drifts, imprecise factory calibration, and aging phenomena.
Sergiusz Łuczak +3 more
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Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study [PDF]
Sensors, 2008 With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen.
Robert Pietruszkiewicz +3 more
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A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders [PDF]
Sensors, 2021 The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications.
Michał Szermer +9 more
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A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity [PDF]
Microsystems & NanoengineeringAnti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias force and displacement for achieving stiffness ...
Ruihong Xiong +6 more
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Modeling and non-linear responses of MEMS capacitive accelerometer
MATEC Web of Conferences, 2014 A theoretical investigation of an electrically actuated beam has been illustrated when the electrostatic-ally actuated micro-cantilever beam is separated from the electrode by a moderately large gap for two distinct types of geometric configurations of ...
Sri Harsha C. +2 more
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Low cost MEMS accelerometer and microphone based condition monitoring sensor, with LoRa and Bluetooth Low Energy radio [PDF]
HardwareXVibration-based Condition Monitoring (CM) is an essential tool for identifying potential defects in industrial machinery. However, the implementation of an efficient CM system often necessitates the use of high-cost accelerometers with a large bandwidth.
Morten Opprud Jakobsen
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