Results 41 to 50 of about 141,143 (179)

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer

open access: yesMicromachines, 2023
This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and
Guowen Liu   +7 more
doaj   +1 more source

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

open access: yesSensors, 2015
We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by
Adel Merdassi   +2 more
doaj   +1 more source

Design and Simulation of a Novel Bio-Mechanic Piezoresistive Sensor with Silicon Nanowires [PDF]

open access: yes, 2012
This paper presents the design of a novel single square millimeter 3-axial accelerometer for head injury detection of racing car drivers. The main requirements of this application are miniaturization and high-G measurement range.
Dariol, V.   +4 more
core   +1 more source

A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

open access: yesFrontiers in Mechanical Engineering, 2022
MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj   +1 more source

A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer

open access: yesMicromachines, 2018
Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work.
Xiangyu Li, Jianping Hu, Xiaowei Liu
doaj   +1 more source

Recent Advances of Slip Sensors for Smart Robotics

open access: yesAdvanced Materials Technologies, EarlyView.
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang   +8 more
wiley   +1 more source

Optimization of MEMS capacitive accelerometer [PDF]

open access: yesMicrosystem Technologies, 2013
A micro machined accelerometer based on an area variation capacitive sensing for more applications was developed, in this case, we will describe and improve in this work the efficacity as well as the sensitivity of a capacitive accelerometer based on an area of variation capacitive sensing considered as a micro system electro mechanical (MEMS ...
Benmessaoud, Mourad   +1 more
openaire   +1 more source

A Review on Sensor Technologies, Control Approaches, and Emerging Challenges in Soft Robotics

open access: yesAdvanced Robotics Research, EarlyView.
This review provides an introspective of sensors and controllers in soft robotics. Initially describing the current sensing methods, then moving on to the control methods utilized, and finally ending with challenges and future directions in soft robotics focusing on the material innovations, sensor fusion, and embedded intelligence for sensors and ...
Ean Lovett   +5 more
wiley   +1 more source

Fully differential electro-mechanical phase locked loop sensor circuit [PDF]

open access: yes, 2013
Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range
Wilcock, Reuben   +5 more
core   +1 more source

A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

open access: yesMicrosystems & Nanoengineering, 2022
This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters ...
Tian Liang   +6 more
doaj   +1 more source

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