Results 41 to 50 of about 387,108 (145)

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Micromachines, 2022
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types.
Samir Abozyd, A. Toraya, Noha Gaber
semanticscholar   +1 more source

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

Micromachines, 2022
High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high.
Ying-Chun Fu, G. Han, Jie-Bin Gu, Yong-Mei Zhao, Jin Ning, Zhen-Yu Wei, Fu-Hua Yang, Chao-Wei Si   +7 more
semanticscholar   +1 more source

MEMS Accelerometer Noises Analysis Based on Triple Estimation Fractional Order Algorithm

Sensors, 2022
This paper is devoted to identifying parameters of fractional order noises with application to noises obtained from MEMS accelerometer. The analysis and parameters estimation will be based on the Triple Estimation algorithm, which can simultaneously ...
Michal Macias, Dominik Sierociuk, Wiktor Malesza   +2 more
doaj   +1 more source

Calibration Analysis of High-G MEMS Accelerometer Sensor Based on Wavelet and Wavelet Packet Denoising

Italian National Conference on Sensors, 2021
High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet ...
Yunbo Shi, Juanjuan Zhang, Jingjing Jiao, Rui Zhao, Hui-Liang Cao   +4 more
semanticscholar   +1 more source

Improvement of GNSS Carrier Phase Accuracy Using MEMS Accelerometer-Aided Phase-Locked Loops for Earthquake Monitoring

Micromachines, 2017
When strong earthquake occurs, global navigation satellite systems (GNSS) measurement errors increase significantly. Combined strategies of GNSS/accelerometer data can estimate better precision in displacement, but are of no help to carrier phase ...
Tisheng Zhang, Hengrong Liu, Qijin Chen, Hongping Zhang, Xiaoji Niu   +4 more
doaj   +1 more source

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

Sensors, 2015
We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by
Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu   +2 more
doaj   +1 more source

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer

Micromachines, 2023
This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and
Guowen Liu, Yu Liu, Zhaohan Li, Zhikang Ma, Xiao Ma, Xuefeng Wang, Xudong Zheng, Zhonghe Jin   +7 more
doaj   +1 more source

A New Joint Denoising Algorithm for High-G Calibration of MEMS Accelerometer Based on VMD-PE-Wavelet Threshold

Shock and Vibration, 2021
Recently, the High-G MEMS accelerometer (HGMA) has been used in navigation, mechanical property detection, consumer electronics, and other fields widely.
Hui-Liang Cao, Ze-Kai Zhang, Yu Zheng, Hao Guo, Rui Zhao, Yunbo Shi, Xiu-Jian Chou   +6 more
semanticscholar   +1 more source

Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms

Micromachines
This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Jiaqi Miao, Ping-Hua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijian Ma, Xu-Ye Zhuang   +7 more
semanticscholar   +1 more source

A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

Frontiers in Mechanical Engineering, 2022
MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj   +1 more source