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Some of the next articles are maybe not open access.

An Oil-Filled MEMS Resonant Pressure Sensor Based on Electrostatic Stiffness Modulation

IEEE Electron Device Letters, 2023
Yulan Lu, Deyong Chen, Junbo Wang
exaly  

Fuzzy sliding-mode control of the electrostatically tuned quasi-zero stiffness MEMS accelerometer

2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2022
Ziyi Ye   +6 more
openaire   +1 more source

Electrostatic frequency reduction: A negative stiffness mechanism for measuring dissipation in a mechanical oscillator at low frequency

open access: closed, 2021
Andrew Erwin   +8 more
openalex   +1 more source

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