Results 231 to 240 of about 1,371 (244)
Some of the next articles are maybe not open access.
An Oil-Filled MEMS Resonant Pressure Sensor Based on Electrostatic Stiffness Modulation
IEEE Electron Device Letters, 2023Yulan Lu, Deyong Chen, Junbo Wang
exaly
Fuzzy sliding-mode control of the electrostatically tuned quasi-zero stiffness MEMS accelerometer
2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2022Ziyi Ye +6 more
openaire +1 more source
A resonant accelerometer based on electrostatic stiffness and its closed‐loop control method
Heng Liu, Wei Su, Zhang Fu-tang
openalex +1 more source
Diminish electrostatic in piezoresponse force microscopy through longer or ultra-stiff tips
Andrés Gómez, Teresa Puig, X. Obradors
openalex +1 more source
Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope
Hongsheng Li, Huiliang Cao, Yunfang Ni
openalex +1 more source

