Results 111 to 120 of about 1,106 (198)

Electrothermal Actuators for SiO₂ Photonic MEMS.

Micromachines
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are positionable. These
Tjitte-Jelte, Peters, Marcel, Tichem
openaire   +1 more source

Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance

, 2014
In this paper we present improved polymer electrothermal actuators made of the epoxy-based UV-negative photoresist SU-8 with metallic heater. Based on a reference design with meandered heater of 50 µm path width, a new meander pattern with a path ...
Schlaak, Helmut F., Noronha, Kenneth M., Winterstein, Thomas   +2 more
core   +1 more source

Electrothermal Actuator Performance Analysis via the Moving Least Square Method. [PDF]

Micromachines (Basel)
Gu Y, Liu J, You Z, Wu L, Chen H.
europepmc   +1 more source

3D Lithography using X-ray Exposure Devices Integrated with Electrostatic and Electrothermal Actuators

, 2002
We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures.
Lee, Seung Seob, Lee, Kwang-Cheol
core  

Hierarchical laser-programmed soft actuators for designing bionic robots with freeform morphing shapes. [PDF]

Sci Adv
Guo Y, Han M, Yang W, He M, Duan H, Ding X, Luo S.   +6 more
europepmc   +1 more source

Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization. [PDF]

Micromachines (Basel)
Rahman O, Rahman MM, Akter O, Uddin MN, Rahman MS, Roy S, Sarker MS.   +6 more
europepmc   +1 more source

A Programmable Soft Electrothermal Actuator Based on a Functionally Graded Structure for Multiple Deformations. [PDF]

Polymers (Basel)
Bu F, Zhu F, Zhang Z, Xiao H.
europepmc   +1 more source

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement. [PDF]

Micromachines (Basel)
Shuaibu AH, Rabih AAS, Blaquière Y, Nabki F.   +3 more
europepmc   +1 more source

Wire-form shape memory alloy actuators: modeling, design, and control. [PDF]

Microsyst Nanoeng
Zhang R, Yue H, Sun H, Wang M, Yang F, Liu J, Yu Z, Huang X.   +7 more
europepmc   +1 more source

Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors. [PDF]

Microsyst Nanoeng
Xue W, Su Y, Qiao W, Liu Y, Yang Y, Zhao H, Zhang P, Shen G, Chen H, Wang Y, Wu Z, Wang L.   +11 more
europepmc   +1 more source