Results 31 to 40 of about 1,106 (198)
Large Out-of-Plane Deflection MEMS Actuators for Optical Applications
Proceedings, 2018 The design and fabrication of an electrothermal MEMS actuation structure which is capable of producing large out-of-plane deflection is presented. The actuators are used to move a 1 mm2 mirror structure, where the large deflection allows one to achieve ...
David Torres +2 more
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Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
Micromachines, 2023 Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs).
Almur A. S. Rabih +3 more
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A miniaturized polymer-based bimorph actuator with self-sensing capability
AIP Advances, 2021 Soft actuators have recently attracted great attention in the fields of soft robots, artificial muscles, and biomimetic devices. As the size is reduced to sub-centimeter scale, most soft actuators only possess actuation capabilities without integrated ...
Huey Shy Tan +4 more
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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Nanoscale Research Letters, 2021 Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology.
Abdullah Saleh Algamili +6 more
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Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs
Micromachines, 2019 Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting ...
Peng Wang +5 more
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Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams [PDF]
, 2022 Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of W/L≤0.001 of the type found in nanoelectromechanical systems (NEMS).
Dixi Liu +3 more
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Advances in Mechanical Engineering, 2021 In this paper, an electrothermal shape memory alloy helical spring actuator constructed from shape memory alloy with copper-cored enameled wire is presented and fabricated.
Yang Xiong, Jin Huang, Ruizhi Shu
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A novel continuously variable angular vertical comb-drive with application in scanning micromirror
, 2013 An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror.
Lì, Lì L. +7 more
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Sensors, 2023 In this paper, a portable photoacoustic microscopy (PAM) system is proposed based on a large stroke electrothermal micromirror to achieve high resolution and fast imaging.
Yuanlin Xia +5 more
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Scanning Micromirror Platform Based on MEMS Technology for Medical Application
Micromachines, 2016 This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume.
Eakkachai Pengwang +3 more
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