Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2021 This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology ...
Michael Huff
doaj +3 more sources
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review [PDF]
Micromachines, 2020 High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X ...
Lucia Romano, Marco Stampanoni
doaj +3 more sources
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2023 Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]
Lucia Romano, Konstantins Jefimovs
doaj +3 more sources
Gold etching for microfabrication [PDF]
Gold Bulletin, 2014 The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries.
Green, T. A.
core +4 more sources
Atmospheric Gas-Phase Catalyst Etching of SiO2 for Deep Microfabrication Using HF Gas and Patterned Photoresist. [PDF]
ACS Appl Mater InterfacesMicro/nanoscale structure fabrication is an important process for designing miniaturized devices. Recently, three-dimensional (3D) integrated circuits using SiO2 via-holes interlayer filling by copper have attracted attention to extend the lifetime of ...
Sano KH +5 more
europepmc +4 more sources
Plasma-based etching approach for GEM detector microfabrication at FBK for X-ray polarimetry in space [PDF]
Journal of Instrumentation, 2023 Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarization of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the ...
A. Lega +10 more
semanticscholar +5 more sources
Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices [PDF]
MicromachinesAdvances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz ...
Xinghui Li, Jinjun Feng
doaj +3 more sources
Xenon Difluoride Dry Etching for the Microfabrication of Solid Microneedles as a Potential Strategy in Transdermal Drug Delivery. [PDF]
Small, 2023 Although hypodermic needles are a "gold standard" for transdermal drug delivery (TDD), microneedle (MN)-mediated TDD denotes an unconventional approach in which drug compounds are delivered via micron-size needles.
Ismail Eş +3 more
semanticscholar +2 more sources
Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching [PDF]
Sensors and materials, 2019 We demonstrated a Si-based concave micromirror array for cell trapping that was fabricated by XeF2 vapor etching. We also examined the optical properties of the focal image of each concave micromirror. In addition, yeast cell trapping was realized at the
A. Matsutani +3 more
semanticscholar +2 more sources
Nano-Micro Letters, 2021 Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical ...
Lili Zhao +8 more
doaj +2 more sources