Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2021 This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology ...
Michael Huff
doaj +5 more sources
Gold etching for microfabrication [PDF]
Gold Bulletin, 2014 The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries.
Green, T. A.
core +7 more sources
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review [PDF]
Micromachines, 2020 High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X ...
Lucia Romano, Marco Stampanoni
doaj +8 more sources
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2023 Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]
Lucia Romano, Konstantins Jefimovs
doaj +3 more sources
Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis [PDF]
Micromachines, 2022 We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang +9 more
doaj +2 more sources
Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray polarimetry in space [PDF]
arXiv, 2023 Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarisation of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the Polarlight cubesat pathfinder and the PFA telescope onboard the future large enhanced X-ray Timing ...
Alessandro Lega +10 more
arxiv +3 more sources
Microfabrication of Laser-Driven Accelerator Structures [PDF]
AIP Conf.Proc. 647 (2003) 324-330, 2003 We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process. We conclude by considering the issues microfabrication raises for possible future structures.
Cowan, Benjamin
arxiv +5 more sources
Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for micro-fabrication [PDF]
, 2012 The following paper describes a design of experiments investigation of the deep reactive of pillar structures on a silicon wafer. The etched wafers would subsequently be used as masters for the fabrication of nickel mould inserts for microinjection ...
Alcock, Jeffrey R. +2 more
core +3 more sources
Microfabrication of Transparent Thermoplastic Resin Plates by Dry Etching
Journal of the Vacuum Society of Japan, 2009 This paper describes the microfabrication of transparent thermoplastic plates, polymethyl-methacrylate, polycarbonate, and cyclic olefin polymer by an electron cyclotron resonance-reactive ion etching (ECR-RIE) system. The system was adopted for the microstructure with smooth surface and high-aspect ratio.
S. Wakabayashi +3 more
openalex +4 more sources
High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating [PDF]
Advanced Engineering Materials, 2020 Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2.
Lucia Romano +3 more
openalex +5 more sources