Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2021 This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology ...
Michael Huff
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Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review [PDF]
Micromachines, 2020 High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X ...
Lucia Romano, Marco Stampanoni
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Gold etching for microfabrication [PDF]
Gold Bulletin, 2014 The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries.
Green, T. A.
core +6 more sources
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2023 Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]
Lucia Romano, Konstantins Jefimovs
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Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing [PDF]
Scientific ReportsTerahertz (THz) metamaterials have garnered attention for their unique electromagnetic properties and potential applications in biomaterial sensing, offering label-free, non-contact capabilities. However, their performance is limited by their diffraction
Naoki Inomata +4 more
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Selective laser etching fabrication of stacked microporous membranes for multisize particle separation in 3D microfluidics [PDF]
Scientific ReportsGlass substrates are widely utilized in microfluidic applications due to their exceptional properties, including optical transparency, biocompatibility, chemical and thermal stability, and compatibility with standard microfabrication techniques.
Diego Duran-Arteaga +3 more
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Ultrafast Laser-Enabled 3D Glass Microchannel Reactors [PDF]
SensorsMicrochannel reactors are among the most important tools used for high-performance continuous-flow synthesis. However, most microchannel reactors manufactured with conventional micromachining techniques are limited to two-dimensional (2D) planar ...
Xiaolong Li +3 more
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Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching. [PDF]
ACS Appl Mater InterfacesSano KH +6 more
europepmc +3 more sources
Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices [PDF]
MicromachinesAdvances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz ...
Xinghui Li, Jinjun Feng
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Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip
Micromachines, 2023 Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on ...
Yeongseok Jang, Jinmu Jung, Jonghyun Oh
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