Results 161 to 170 of about 189,870 (274)

Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz. [PDF]

Adv Sci (Weinh)
Wang W, Baranski M, Jin Y, Salut R, Belharet D, Friedt JM, Pan Y, Xiang Y, Xuan FZ, Khelif A, Benchabane S.   +10 more
europepmc   +1 more source

Microfabrication and Plating. Photolithography. Etching.

, 1995
Hisatake Sano
openalex   +2 more sources

Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage. [PDF]

Nanomicro Lett
Ma Y, Wang S, Wu ZS.
europepmc   +1 more source

Microfabrication of Black Ge by SF6/O2- and C4F8-based Deep Reactive Ion Etching

Mie Tohnishi, Sachiko Matsushita, Akihiro Matsutani   +2 more
openalex   +1 more source

Three-Dimensional Microfabrication Using Focused Ion Beam Irradiation and Chemical Etching (High-Efficient Structure Fabrication)

, 2008
Noritaka Kawasegi, Tatsuya FUKASE, Noboru Morita, Kiwamu ASHIDA, Jun Taniguchi, Iwao Miyamoto, S. Momota   +6 more
openalex   +2 more sources

A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation. [PDF]

Nanomaterials (Basel)
Dai X, Hu Y, Niu B, Dai Q, Ao Y, Zhang H, Jing G, Li Y, Fan G.   +8 more
europepmc   +1 more source

Femtosecond laser microfabrication of a fully-integrated optofluidic device for 3D imaging flow cytometry. [PDF]

Sci Rep
Sala F, Paiè P, Candeo A, Ceccarelli F, Osellame R, Bassi A, Bragheri F.   +6 more
europepmc   +1 more source

Chemical etching of silicon assisted by graphene oxide under negative electric bias. [PDF]

Nanoscale Adv
Goto Y, Utsunomiya T, Ichii T, Sugimura H.   +3 more
europepmc   +1 more source

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition. [PDF]

Micromachines (Basel)
Tsai YC, Huang PC, Dai CL.
europepmc   +1 more source

Influence of microfabrication on superconducting properties of exfoliated thin films of layered superconductor NbSe₂: reactive ion etching

, 2019
Hikari Tomori, Naoki Hoshi, Dai Inoue, Akinobu Kanda   +3 more
openalex   +1 more source